High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Modular Type Filter Regulator Series AW

to Order 03 BG 30 AW F 2 N X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is

13

ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 Rc 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19

High Purity Fluoropolymer

Model L M N W H E W 4 6 19 LQ2U22 LQ2U21 19.9 55 18 16 1/4 (M) 10 LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 6 8 26.2 22 24 24 H 77 64 (E) (E) 12 19 10 12 L 33.1 21 28 30 30 Class 2, 3 88 75 40 26 32 36 36 86 (M) N Inch sizes Applicable tubing O.D.

CLQ

L d l D m d H B C IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 8 for axis 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 24 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Simple Joint

Modular Type Lubricators Series AL

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

Prevents Micro-Bubbles

L LQ LVN 4-M TI/ TIL K Non-locking type PA Locking type PAX 60 PB (H2) (H1) C B A E J B (F) (mm) Dimensions A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 17-5-29 27 Series LVH Dimensions/Threaded Type N Body material: Stainless steel Body

5 Port Solenoid Valve

F P M L T Kit q w r !

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Compact Cylinder with Lock Series CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

KP/KPQ/KPG

Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS KPH04-00 37.4 18 4 4 4 10.4 4 L L2 L1 D D KPH06-00 39.6 19.5 10 10 6 12.8 6 M M L KPH08-00 44.4 21.5 26 18 10 15.2 8 KPH10-00 48.6 24 41 29 15 18.5 10 KPH12-00 50.6 25 58 46 18 20.9 12 Note 1) D indicates the maximum diameter.

0.4

EX510 How to order manifold blocks with lead wire SQ1000 SQ2000 F kit P kit J kit SSQ1000 FS 3 1A 03 SSQ2000 FS 3 1A 03 T kit Lead wire type Lead wire type Without lead wire (for using spare connectors to add stations) F kit (D-sub connector kit) Single wiring Without lead wire (for using spare connectors to add stations) F kit (D-sub connector kit) Single wiring F0 F0 L FS FS kit F kit (

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

Air Cylinder Series CM2

D C H B Clevis Pin (For CLM2E) (mm) Applicable bore size 20 25, 32 40 D d H B C Part no. SN-020B SN-032B SN-040B Material: Carbon steel 8 26 M20 x 1.5 30 25.5 d D 8 32 M26 x 1.5 37 31.5 10 41 M32 x 2.0 47.3 40.5 l m m t t L Trunnion Nut (mm) Part no. Applicable retaining ring part no.

JXCx-OMT0023

H T E (Note)L d W D T Max.

SQ1000/2000

L RUN SERIAL UNIT L ERR.

Air Cylinder Series MB

) Knuckle joint pin Clevis pin 2 x d d Dd9 D C L l m H B d (Through hole diameter) D Bore size (mm) Clevis Knuckle Part no.