min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/
Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1
Thread: N (NPT), Seal: None, Options: 6P (6 + P)
Thread: N (NPT), Seal: None, Options: 6Z (6 + Z)
Thread: N (NPT), Seal: None, Options: Z (5m Lead Wire Length)
Thread: N (NPT), Seal: None, Options: P (Scale Plate Pressure Unit: Both MPa and psi)
Thread: N (NPT), Seal: None, Options: 6L (6 + L)
Thread: N (NPT), Seal: None, Options: 6LP (6 + L + P)
Thread: N (NPT), Seal: None, Options: 6 (0.1 to 0.6MPa Set Pressure Range)
Thread: N (NPT), Seal: None, Options: PZ (P + Z)
Thread: N (NPT), Seal: None, Options: 6PZ (6 + P + Z)
Thread: NPT, Seal: None, Options: 5m Lead Wire Length
Thread: NPT, Seal: None, Options: Scale Plate Pressure Unit: Both MPa and psi
Thread: NPT, Seal: None, Options: 6 + L + P
Thread: NPT, Seal: None, Options: 0.1 to 0.6MPa Set Pressure Range
Thread: NPT, Seal: None, Options: 6 + P + Z