Cylinder with Lock Series CLS

59 D 30 W 14 AL 5 N N A K 43 C B S + Stroke BY H M ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM A AL B BA BB BC BY BZ C D GA GB GC J 15 31 27 M30 x 1.5 50 47 145 75 18 110 136 115 36 16 107 58 M14 x 1.5 to 1000 15 31 27 M30 x 1.5 50 47 161 78 18 2 110 146 128 36 16 114 64 M14 x 1.5 to 1000 17 36 30.5 M36 x 1.5 56

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

CL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2 I H1 AL B2 B1 BN BC F BQ 1/8 1/8 1/8 1/8 GC GB GK GD GQ GL H GR Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/8 8 20 20 8 80 18 55 13 26 5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).

MNB

9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 12 23 55 55.5 31.5 M18 x 1.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 14 33 61 61.5 38 100 M22 x 1.5 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123 15 68 37.5 69.5 38 M26 x 1.5 120 14 10 10.5 9-6-14 15 Series MNB Cylinder with Lock Double Acting, Single Rod Rod side flange style (F): MNBF Rc 1/8 BC

MNB

9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 23 12 55 55.5 M18 x 1.5 31.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 33 14 61 61.5 100 M22 x 1.5 38 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123 15 37.5 68 69.5 M26 x 1.5 38 120 14 10 10.5 9-6-14 15 Series MNB Cylinder with Lock Double Acting, Single Rod Rod side flange style (F): MNBF Rc 1/8 BC

CL

100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35 46 17 17 17 17 CLM2B20SCLM220, #1 (#1+#12) CLM2B25SCLM225, #1 (#1+#12) CLM2B32SCLM232, #1 (#1+#12) CLM2B40SCLM240, #1 (#1+#12) 3.1-20 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLGC CNA CB CV/MVG (mm) CXW BQ BP Bore Stroke range A 18 22 22 24 BC

CNS

1.5 35 1/2 25 343 20 28 110 27 480 95 93.5 17 36 M12 x 1.75 M36 x 1.5 39 3/4 25 396 25 35 120 30.5 546.5 109 104 With Rod Boot Stroke range (mm) Bore size (mm) l ZZ1 h 125 140 160 0.2 stroke 463 Up to 1000 133 0.2 stroke 503 Up to 1000 133 0.2 stroke 567.5 Up to 1200 141 9-8-12 13 Series CNS Cylinder with Lock Double Acting, Single Rod Foot style (L): CNSL Rc BQ plug with breathing hole BC

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) FX CB CA 3-YA, thread depth YB P .C.D.R MHZ 20 20 MHF 30 K L ZB BB BC BA MHL Open EO Closed EC (Open DO) (Closed DC) ZC VA depth VB O MHR J Q WA depth WB ZA MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com BD NB

MNB

Cushion ring @8 4 Series MNB Dimensions Basic type (B)/MNBB Cushion valve Rc(PT)BP unlocking port Unlocked when pressurized GA Rc(PT)1/8 BC element GD GC GB B ??B2 ??

Cylinder with Lock Series CNS

Seal kits are sets consisting of items 46, 48, 49, 53, 54 and 57, which can be ordered using the seal kit for each cylinder bore size. 4 Series CNS Dimensions Basic type/CNSB 2-MA Effective thread depth R Rc(PT) BQ Plug with breathing hole CL M GA BC element T G G FA GB Rc(PT) BP Unlocking port 2-Rc(PT) P GL GR Width across flats KA Cylinder port MM Q D EA E V AL A K F VA BN C B N N 4-J

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

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x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

LG1H

Yawing 71 79 75 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 10 20 30 0 Transfer load m (kg) 4000 a =1 000

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.