PSxx-OMT0001CN

] [000] 1 [UnLoC] 5 1 1 /30 LOC [FAL]3 LOC -62No.PS-OMT0001CN-E 5 OUT (,) (1)OUT (2 ) (2)OUT (3)O O OUT (4)O (5)OUT , OUT (6)OUT (0.3 Nm) -63No.PS-OMT0001CN-E 5 -64No.PS-OMT0001CN-E 5 ,,, (), (100 kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2

The “□” in the VVFS□000-22A-1 and VVFS□000-22A-2 part numbers is to indicate the series (VFS2000/3000/4000/5000 series).

Type 20 and 23 body ported manifold gasket part number: SY□000-GS-1 (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3120, SY5120, SY7120, SY9120, etc.
Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.

VER2000/4000

Stations 3 8 1 2 Port size Rc , Composed of basic unit (VER 000-A, VS7-8-FG-S-3N) Refer to Best Pneumatics Vol. 2 for details about solenoid valve. 4 2 F.R.L.

MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

Table of Contents

MX M N 4-O MTS T MY Q CY 2-P AH AG K W U L S B MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX AL I D4-AK hole AA R AP J A -X AB Y + Stroke V AI X Z + Stroke AJ 20Data For 4-AO AG AN AI Cutout window AM 100 piston rod end connection Mounting dimensions Bore

15

(Allen-Bradley) Beckhoff Automation GmbH Siemens AG FASTECH Co., Ltd.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MX M N 4-O MTS T MY Q CY 2-P AH AG K W U L S B MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX AL I D4-AK hole AA R AP J A -X AB Y + Stroke V AI X Z + Stroke AJ 20Data For 4-AO AG AN AI Cutout window AM 100 piston rod end connection Mounting dimensions Bore

Made to Order

W U B S L K M A' GR Width across flats XA Unlocking cam R AL V AP Width across flats 12 J I 4 x AK hole PG PL Element AA AJ AI Q AB A X Z + Stroke Y + Stroke AG AN 10 WH (Max.)

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AH ZH, thread depth ZI M5 x 0.8 (Pusher extension port) AG AJ (AF) Center pusher auto switch mounting groove dimensions (2 locations) MHSH3-32DA MHSH3-40DA MHSH3-50DA 4 4 4 3 6.3 3.3 8.8 3 5 5.7 2.7 5 3 12 5.8 12 6 16 MHSH3-63DA MHSH3-80DA 4 4 3 3 7.2

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-9H Petroleum FH34 0 1 to AG-9H-W Water-glycol, Emulsion FH64 0 1 Blanking cap (for differential pressure indication part) AG-9H-V Phosphoric ester AG-12H Petroleum FH342 AG-12H-W Water-glycol, Emulsion AG-12H-V Phosphoric ester 510 A Line Filter FH34/44/54/64 Series How to Order FH 03 3 40 0 0 0 P 005 L Made to Order Hydraulic filter Nil X0 None (Standard) Operating pressure (Max.)

AR Series Modular Type Regulator

Note 3) Standard pressure gauge AL-A AW -A -B Specific Product Precautions AW AG Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for F.R.L. Precautions. E AV Selection Mounting/Adjustment Warning Warning AF 1.

Guide Cylinder Series MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Title not found

Switzerland SMC Pneumatik AG Ireland SMC Pneumatics (Ireland) Ltd. Sweden SMC Pneumatics Sweden AB Denmark SMC Pneumatik A/S Norway SMC Pneumatics Norway AS Russia SMC Pneumatik LLC Poland SMC Industrial Automation Polska Sp.z.o.o Netherlands,Belgium SMC Pneumatics B.V.(Associated company) Finland SMC Pneumatiikka OY (Associated company) Greece S. Parianopoulos S.A.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

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x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .