PSxx-OMR0001CN

] [000] 1 [UnLoC] 5 1 1 /30 LOC [FAL]3 LOC -58No.PS-OMR0001CN-J 5 OUT (,) (1)OUT (2 ) (2)OUT (3)O O OUT (4)O (5)OUT , OUT (6)OUT (0.3 Nm) -59No.PS-OMR0001CN-J 5 -60No.PS-OMR0001CN-J 5 ,,, (), (100 kPa200 kPa) (41 ) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14

Digital Gap Checker

The default setting is [000]. Press the button for 1 second when the security code is [000]. When the key-lock is released, [UnLoC] will be displayed. A new security code can be set by pressing the and buttons simultaneously for 5 seconds or longer. Press the or button to change the 100 digit. When the required number is determined, press the button.

PSxx-OMT0001CN

] [000] 1 [UnLoC] 5 1 1 /30 LOC [FAL]3 LOC -62No.PS-OMT0001CN-E 5 OUT (,) (1)OUT (2 ) (2)OUT (3)O O OUT (4)O (5)OUT , OUT (6)OUT (0.3 Nm) -63No.PS-OMT0001CN-E 5 -64No.PS-OMT0001CN-E 5 ,,, (), (100 kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2

The “□” in the VVFS□000-22A-1 and VVFS□000-22A-2 part numbers is to indicate the series (VFS2000/3000/4000/5000 series).

Type 20 and 23 body ported manifold gasket part number: SY□000-GS-1 (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3120, SY5120, SY7120, SY9120, etc.
Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.

VER2000/4000

Stations 3 8 1 2 Port size Rc , Composed of basic unit (VER 000-A, VS7-8-FG-S-3N) Refer to Best Pneumatics Vol. 2 for details about solenoid valve. 4 2 F.R.L.

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

CLA

.:>: ~,j 61 71 327 347 65 12.5 80 336 356 I 100 1 14 40 'I, 56 .5 15 25 80 25 226 36 0 I ",', 000'" 0 64 72 356 381 65 14.0 81 365 390 Trunnion Type/CLAT Name plate to 1rl'JlCate loclO'Jng BP lock releasl rt \ P Frorll C I'I(jQr port , GA BO lock ()f!

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

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x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

LG1H

Yawing 71 79 75 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 10 20 30 0 Transfer load m (kg) 4000 a =1 000

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Please contact us for the latest version.sales@ocaire.com, MFLD, VFR3*000 SERIES/SIDE POR, VALVE, VV*FR* MANIFOLD VFR SERIES, PM, VV*FR* BASE MT 1/4, 6.94456 lb

Type: 000 (Lever Type Feedback), Pressure Gauge: 3 (1.0MPa), Construction: 1 (w/Terminal Box), Accessories: BF (B+F)

Type: 000 (Lever Type Feedback), Pressure Gauge: 2 (0.3MPa), Construction: 0 (No Terminal Box)

Type: 000 (Lever Type Feedback), Pressure Gauge: 2 (0.3MPa), Construction: 1 (w/Terminal Box)