Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11

CJ2

4 !

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

17

or less Over 100 st 200 st or less Over 25 st 100 st or less 32 40 50 63 30 30 40 50 300 300 300 300 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 35.5 39.5 47 58 33 34 36 38 16 18 21.5 28 45 46 48 50 6.5 13 9 13 83 84 86 88 96 104 130 130 121 122 124 124 44 44 60 70 171 172 174 174 110 118 146 158 42 50 66 80 78 86 110 124 4 4 5 5 98 106 130 142 4.5 4.5 6 6 63 72 92 110 3 3 4 4 24 24 24 28 6 6

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

One-touch Fittings

[mm] Weight [g] With a rib Nylon Urethane 3.2 1/8 KQ2W23-01S 10 7.1 10 14.5 30.3 30.8 13.3 2.8 2.4 2.5 10.8 1/4 KQ2W23-02S 14 7.1 10 14.5 32.8 31.7 13.3 2.8 2.4 2.5 27.3 Applicable tubing 4 1/8 KQ2W04-01S 10 8.2 10 14.8 29.9 30.9 13.3 4 4 3 11 V 1/4 KQ2W04-02S 14 8.2 10 14.8 33.3 32.7 13.3 4 4 3 27.5 V M L1 6 1/8 KQ2W06-01S 10 10.4 10 15.5 31 33.1 13.3 10.9 8.6 4.5 11.4 1/4 KQ2W06-02S

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

AS

-07SD AS221F-02-08SD 3/16" 12.8 25.2 34.5 17 8 36.4 15.2 27.2 18.5 42 17.7 AS221F-N02-07SD AS221F-02-10SD NPT 1/4 17.5 18.5 7.2 1.2 34.7 1/4" 13.2 25.2 34.5 18.5 10 18.5 21 44.5 35.3 44 19.5 42 40.2 AS221F-N02-09SD AS321F-02-06SD 5/16" 15.2 27.2 36.4 6 39.3 12.8 17 27.8 73 21 44 AS221F-N02-11SD AS321F-02-08SD 3/8" 18.3 35.3 44.5 8 41 15.2 29.5 18.5 76 19.5 19 R 1/4 1.2 23 9.8 49.3 21.3 54.8

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VQ5 Stations n: Station (P , EA, EB port) 4 195 207 5 228 240 2 129 141 3 162 174 6 261 273 7 294 306 8 327 339 Formula L1 = 33 x n + 63 L2 = 33 x n + 75 L L1 L2 VQC VQZ Manifold: Non Plug-in Type SQ VV5FR3-10Station 1Port size VFS 44 44 U side 79 48 14.5 9 VFR 63 (A, B port) 2n x 3/8", 1/4" C8, C10 Applicable cable O.D. 8 to 10 R4.5 VQ7 A (A, B port) n B A (Pitch) 3 P=33 B L1 6 L2 A (Pitch

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

REA/REB

Contents REAL20-PS Set of nos. above #2, #3, #4, #5, #6, #7, #8 25 REAL25-PS 32 REAL32-PS 40 REAL40-PS 10-2-44 44 Sine Rodless Cylinder Slider Type: Ball Bushing Bearing Series REAL Dimensions: 10 RE A B 0.5 REC 1 50 6 3 CX 34 103 + Stroke 12 33 14.5 30 12.5 9.5 33 20.5 9.5 CY 4-M4 x 0.7 depth 8 2-M5 x 0.8 13.5 5 Hollow shaft for piping MQQ M 4-8 counterbore Counterbore depth 4 10 RHC A 12

REA/REB

Contents REAL20-PS Set of nos. above #2, #3, #4, #5, #6, #7, #8 25 REAL25-PS 32 REAL32-PS 40 REAL40-PS 10-2-44 44 Sine Rodless Cylinder Slider Type: Ball Bushing Bearing Series REAL Dimensions: 10 RE A B 0.5 REC 1 50 6 3 CX 34 103 + Stroke 12 33 14.5 30 12.5 9.5 33 20.5 9.5 CY 4-M4 x 0.7 depth 8 2-M5 x 0.8 13.5 5 Hollow shaft for piping MQQ M 4-8 counterbore Counterbore depth 4 Courtesy of

Compact

[mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work

REA/REB

4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

CRBU

11-3-4.