Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA WB 2 2 2

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

Table of Contents

(Refer to page 14-19-11.)

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Sine Rodless Cylinder Series REA/REB

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Caution Caution Operation 1.

MHZ

point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa

MHZ

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Gripping point L (mm) Gripping point L (mm) MHS MHZJ2-10D/11-MHZ2-10D External Grip MHZAJ2, MHZJ2, 11-MHZ2 MHC 20 Gripping force (N) Pressure 0.7 MPa Pressure 0.7 MPa MHT 15 0.6 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa 0.2 MPa 0.5

Air Cylinder

11 14 17 17 11 12 15 19 19 501 to 800 11 11 13 16 601 to 1200 601 to 1200 751 to 1400 751 to 1500 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot MM N P RT RY S (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 501 to 800 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 51 58 58 71 72 146 159 170 204 215 56 64 64 76 76 43 52

Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

CY1

Symbol (mm) 11 Helical insert screw specifications -X168 P HTB Model HTA Aperture dia.

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.