Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

R ZZ + Stroke Stroke With air cushion: CJ2D 10 16 AZ WA WB GB NB Rod end nut GA Piping port 2 x M5 x 0.8 45 C C CZ 0 0.3 B 0 0.3 NA CZ 0 0.3 B 0 0.3 ZZ + Stroke Z + Stroke S + Stroke [mm] *: A clevis pin and retaining rings are included.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

SY

83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Terminal block (M3) 9 pins Terminal block

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

SX

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 18 pins Terminal block

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

Table of Contents

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Without auto switch CRB1B J Size Rotating angle Port location Vane type Shaft type J K S T X Y Z Double shaft (Long shaft without keyway & Four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers CRB2 CRBU2 CRB1 MSU J Z Y K S T X Key Key CRJ D C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Valve Single Unit

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

Valve Single Unit

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

90

Make sure that the clip (C) is locked and there is no gap in part (D). Notch Hook A C Hook B w q D Note) If excess force is applied to the filter case, hook A and B may break. Handle with care. 29 Series ZK2 Specific Product Precautions 4 Be sure to read the below before handling. Refer to back cover for Safety Instructions.

45

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

10

0.3 to 1 RB series M8 x 1.0 RB0806(C) RB1006(C) M10 x 1.0 Basic type RB1007(C) P.895 to Stopper nut 0.05 to 5 RB1411(C) M14 x 1.5 RB1412(C) RB2015(C) M20 x 1.5 M27 x 1.5 RB2725(C) RBL1006(C) RBL series Coolant resistant type Basic type M10 x 1.0 RBL1007(C) RBL1411(C) P.906 to 0.05 to 5 M14 x 1.5 RBL1412(C) RBL2015(C) M20 x 1.5 M27 x 1.5 M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 RBL2725

45

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

C95Series

D-A44 Conduit , _;-c' I>-F5CJ51!:1 Grommet D-F5i!