90

directions, for 2 hours each (De-energized) 100 m/s2 in X, Y, Z directions, 3 times each (De-energized) 2% F.S.

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

Table of Contents

(Hexagon width across flats) (Hexagon width across flats) H2 H2 (Hexagon width across flats) (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 L5 A1 D1 A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Electric Rotary Table

230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 20 H1 H2 H3 Model LER50 LERH50 16 5.5 15.5 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 10 Series LER Electric Rotary Table/ Specific Product Precautions 1 Be sure to read before handling.

KF

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H2 (Hex.) Weight (g) L1 L2 L3 M d Part No. O.D.

S Couplers Series KK/KKH/KK13

Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Lead wire* (m) Load voltage Indicator Style Special function Wiring (Output) Electrical entry Auto switch model Applicable load 0.5 () 3 (L) 5 (Z) None (N) DC AC 3 wire (NPN) C76 C73 C80 B53 B54 B64 C73C C80C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA G5NT H7NF H7LF 5V IC Yes 12V 5V, 12V 12V 12V 12V 12V 5V, 12V 12V 100V 100V or less Relay PLC No IC Grommet PLC

SZ3000

Without light/surge voltage suppressor (A) 4 (B) 2 A 4 Nil Common specifications A 2 With surge voltage suppressor B SOL.b SOL.a 3 (R) S 5 (R) Nil N Positive common 1 (P) Negative common With light/surge voltage suppressor Z The symbol is Nil when not equipped with light/surge voltage suppressor. 4 position dual 3 port valve: N.O./N.O.

Digital Flow Switch (Integrated display type)

Input of set values P2AH n2AH P2AL n2AL P2dH Setting of Setting of Setting of Setting of n2dH P2dL n2dL P2L/n2L P2H/n2H tnL/tPL P_2/n_2 tn/tP tnH/tPH H_2 H_t H2 Ht (Page 41) (Page 43) (Page 41) (Page 43) (Page 42) 4. Completed [F 2] Setting of OUT2 is completed. -39No.PF-OMM0005-N 1.

45

Common connector assembly for manifoldRefer to page 1-6-9. 1-6-74 Base Mounted Series SX3000/5000 How to Order Valves 5 L N SX 5 2 40 Series Manual override 3 SX3000 5 SX5000 Nil Non-locking push type D Push-turn locking slotted type SV Type of actuation Light/Surge voltage suppressor 1 2 position single 2 2 position double SZ Nil Without light/surge voltage suppressor S Z With surge voltage

SZ3000

Without light/surge voltage suppressor (A) 4 (B) 2 A 4 Nil Common specifications A 2 With surge voltage suppressor B SOL.b SOL.a 3 (R) S 5 (R) Nil N Positive common 1 (P) Negative common With light/surge voltage suppressor Z The symbol is Nil when not equipped with light/surge voltage suppressor. 4 position dual 3 port valve: N.O./N.O.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Nil A 4 (A) 4 (B) 2 S With surge voltage suppressor A 2 With light/Surge voltage suppressor B SOL.b SOL.a Z 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.O./N.O. (A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (length 300mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

Prevents Micro-Bubbles

Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D

H/DL/L/LL

P. 64 15-2-61 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Series H, DL, L, LL Self-align Fittings

H2 (Hex.)

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13