Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+N+Y

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+W

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: DeviceNet Communication

1

Z NS NZ Nil H None Built-in Only rubber seal type.

CATALOG

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

2

For model selection of an auto-drain, refer to the Selection Precautions on page 123. 5 10 20 Port size 3 Port size Symbol H Nil Nil Nil Nil H H H 01 02 03 1/8 1/4 3/8 Thread type Symbol Type Nil N F Rc NPT G Components 3 10 20 5 Components Nil H Nil H Nil H Nil H Mist separator Micro mist separator AFM30-A AFD30-A AFM20-A AFD20-A AWD30 AWD20 Micro mist separator regulator Replacement Parts

A

L I D E R T Y P E L O W S P E E D R O D L E S S C Y L I N D E R O P T I O N XB13 NC(D)Y2 S XB13 NCY2 B S W I T C H B O R E S I Z E S T R O K E ( I N C H) B O R E S I Z E S T R O K E A D J U S T M E N T M A G N E T I C H O L D I N G P O W E R M A G N E T I C H O L D I N G P O W E R S T R O K E ( I N C H) Type Basic Type / Slider Type T E C H N I C A L SPECIFICATIONS B A S I C T Y P E X B

Table of Contents

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Table of Contents

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

Made to Order

Cylinders Mechanically Jointed Rodless Cylinder Stroke adjusting unit Bore size Type Model 10 16 20 25 32 40 L H L H L H L H L H L H L H L H L L L H L H L H L H L H L H L H L H 50 RJ1412H RJ1007H RJ1412H RB1007 RB1412 -XB22 MY1B-Z MY1H-Z RB1412 RB2015 Standard RJ0806H RJ1007H RB0806 RB1007 -XB22 RJ0805 MY1B Standard RB0805 RJ0806H RJ1007H RJ1412H RB1007 RB1412 RJ1412H -XB22 MY1M MY1C RJ1007H

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Power saving circuit is only available in the Z type.

Air Cylinder Series CM2

MM ND hole H10 Axis d9 NX2 L R2 U2 A H Z (Min.)

4/5 Port Solenoid Valve

) Z: Positive common specifications only.

Air Cylinder

Rod end nut Mounting nut NDh8 NDh8 NN GA GA NN MM Piping port 2 x M5 x 0.8 C MM D 0 0.3 B 0 0.3 A H F T NA Z + 2 x Stroke S + Stroke NA T F H + Stroke A B Stroke CJ2WB 10 16 Z NDh8 Mounting nut Rod end nut MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 NN C D B 0 0.3 Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 Stroke With air cushion: CJ2WB 10 16 AZ Mounting nut WA WA

Air Cylinder

-R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N

NCQ2/CQ2

-20DC-H -25DC-H -50DC-H -75DC-H x 80L x 85L x 90L x 120L x 145L x 170L 12.5 105 130 -100DC-H -100DC-H 180 90 95 C BQ2B32-10DC-H C BQ2B63-10DC-H -15DC-H -20DC-H -25DC-H -50DC-H -75DC-H -15DC-H -20DC-H -25DC-H -50DC-H -75DC-H x 80L x 85L x 90L x 115L x 140L x 165L 13.5 105 155 180 -100DC-H -100DC-H C BQ2B80-25DC-H 12.5 -50DC-H C BQ2B100-25DC-H 13 -50DC-H 170 x 170L With Rod End Lock (R ) Cylinder