Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
. + vacuum ejector) Series ZYX3000 Series ZYY3000 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Connector box type LOU Lead wire/Voltage suppressor specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000
ZYY3000 (Solenoid valve: SY3000) HEP Related Equipment 1081 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Lead wire/ Voltage suppressor specifications Connector box type LOU L Z 5 LOU 10 Y3 ZY S 15 Series Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN
) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -
to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2
80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.
L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.
Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.
Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLG CNA CNG MNB CNS (mm) CLS Bore Stroke range A 18 22 22 24 AL 15.5 19.5 19.5 21 B 40 47 47 54 B1 13 17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ D 8 10 12 14 F 13 13 13 16 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2
80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.
H2 H1 H1 H2 13 26 M L1 L1 M L3 When connected Min. hole size Min. hole size Applicable hose I.D./O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.
S Bore size Stroke M5 x 0.8 Manual override RE A B Width across flats B1 REC CX CY Mounting hole Width across flats B2 Width across flats NA MQQ M S + Stroke LS + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3L T Bore size Stroke RS Q G RS H A H + Stroke RZQ MI W S CEP1 Z + Stroke ZZ + 2 x stroke CE1 CE2 ML2B Bore size (mm) B2 MM LZ LY LX LT LH LD H1 B1 LC H B K F AL NA H2
ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.
L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.
Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.
(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5
Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1
-006 NTP-010 NTP-015 4 M2 x 0.4 1.6 4 4.6 4 5 6 9 M2 x 0.4 3 6 5 6 M3 x 0.5 1.8 5.5 6.4 6 6 8 11 M3 x 0.5 5 8 6 10 M4 x 0.7 2.4 7 8.1 10 8 10 13 M4 x 0.7 6 10 8 16 M5 x 0.8 3.2 8 9.2 16 10 12 15 M5 x 0.8 7 12 10 30 Pin Cylinder: Double Acting, Single Rod Series CJP2 Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9(V), D-M9(V), D-M9WV B H3 CJ1 H2
Stroke adjustment unit A MYH L2 25 6N Intermediate fixing spacer Intermediate fixing spacer Stroke adjustment unit Nil Without spacer Bore size 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit type Long spacer Spacer length Symbol Mounting position Left Right Left Right Left Right Spacer delivery type Stroke adjustment unit Nil N Unit installed Spacer only A1 A2 L1 L2 H1 H2 A unit Spacers
across flats) (Hexagon width across flats) H2 Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d A L4 L4 A L3 D1 D1 L3 M D2 L2 L1 M T D2 L2 L1 T Metric Size Min.