CV/MVGQ

22 15 17 6 8 12 CV 41 75 84.8 55 3.2 30 7 4 54 7 50 21 42.5 46.5 16 24 21.5 22 8 10 14 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ ZZ S LS ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177 137 181 152 112 156 127 87 RB 25 8 20 M26 x 1.5 210 177 137 185 152 112

CV/MVGQ

40 5.5 13 19.5 33.5 10 22 63.5 17 32 37 6 8 45 75 60 4 7 40 5.5 13 19.5 37.5 12 22 68 17 32 37 6 8 50 82 36 66 5 7 52 7 16 21 46.5 14 24 76 22 41 47.3 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) Z NN NA N MM Symbol Q QY Bore (mm) 20 25 32 40 ZZ S ZZ S ZZ S ZZ S ZZ S 20 25 32 40 20 25 32

Mechanically Jointed Rodless Cylinder Series MY1

Mass m X-axis Y-axis Z-axis 20 Z W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

Compact Hydraulic Cylinder

1 u t w y o !2 Bore size 20 Bore sizes 20 & 25 CHQ CHKm CHN CHM CHSm CH2m Description Material Note Parts List No.

REA/REB

RZQ MI W S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

REA/REB

RZQ MI W S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

15

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

Compact Cylinder

) Mounting 32 to 100 20, 25 Nil S n 2 pcs. 1 pc. n pcs.

Environment

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000

REA/REB

Speed 600 mm/s W W W Dynamic moment Moment generated by the load equivalent to the impact at the stroke end Guide central axis We = 5 x 10-3 WgU Pitch moment Me1 = 1/3WeL Yaw moment Me3 = 1/3We(LA) (mm) We: Load equivalent to impact [N] W: Load weight [kg] U: Maximum speed [mm/s] g: Gravitational acceleration (approx. 9.8m/s) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5

Table of Contents

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

4/5 Port Solenoid Valve

Without connector Without connector cable With connector cable Note 1) S 5 VDC 15 1500 mm R 3 VDC 20 2000 mm L plug connector 1 100 VAC 50/60 Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

ISO Cylinder

C D S N S L V B 40 20 M9BW 85 Single acting, Spring return/extend Accessory*1 Number of auto switches Built-in magnet Nil 2 S 1 n n Nil None V Rod end W Double knuckle joint Nil None D Built-in magnet *1 Refer to Mounting Brackets/ Accessories on page 21 for details of accessories. * Accessory is shipped together with the product.

0.4

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Air Cylinder Series CM2

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Metal Seal/Rubber Seal Series VQ Body Ported

U S U S AXT100-1-P (2) U S U S U S Flat cable housing assembly = Number of pins: 26, 20, 16, 10 P kit w VQ0 AXT100-1-J 20 (2) Flat cable housing assembly J kit AXT100-1-F (2) D-sub connector housing assembly = Number of pins: 25, 15 F kit e VQ4 Note 1) S kit is composed of a flat ribbon cable housing assembly (AXT100-1-PU20) of q SI unit and w P kit (20 pins).

Base Mounted Metal Seal/Rubber Seal Series VQ

4) AXT100-2-TB2 (4) VQD Note 1) A S kit is composed of a flat ribbon cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).