SMC Corporation of America
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Note) F/P/J/G kit are available with Nil only. M kit is available with [W] only. S/T kit are selectable depending on the manifold type. S Option Note 1) The !5s fitting assembly is included. Note 2) The housing assembly and SI unit of F/P/J/G/S kit are not included. Separately place an order for q, w, e, r.

S 1 pc. n n pcs. 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Not available with auto switch. With rod boot/cushion Built-in Magnet Cylinder Model Rod boot Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

EMO circuit An EMO (EMergency Off) circuit is an electrical circuit provided to shut off all power and ensure safe conditions when an emergency stop button (EMO button) is pressed in an emergency. Hardware interlock This is an equipment control circuit for shutting off power in case of trouble.

E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 100

(mm) Bore size (mm) CC Single acting 80 50 32 RB 40 63 50 80 Option J Three types of action With lock mechanism With cancel cap Vm/min D1. Single acting 2. Double acting 3.

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13

40 40 DIN terminal Conduit terminal J 58.5 58.5 54.5 56.5 J 1/4, 3/8 1/2 I 19.5 19.5 I H 54 56 46.5 46.5 I H I Normally closed 26 28 20 24 30 26 80.5 86 11 14.5 21 28 61 61 92 92 VXD2130 Model Grommet Electrical entry (AC/Class B coil) Conduit H 53 55 48.5 48.5 DIN terminal Conduit terminal J 65.5 65.5 53 55 Normally closed H 58 60 I 30 30 I H 54 56 53.5 53.5 I H I J 69.5 69.5 100.5 100.5

Note) L Note) J Note) M Note) K Note) J Note) L Note) K Note) M Note) L Note) N Note) M Note) N Note) Note) Since the bracket is attached to the resin body type H, J, K, L, M, N, XB cannot be selected.

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

10 0.035 J Allowable kinetic energy MB 0.090 J 16 No freezing MB1 Standard Stroke (N) Spring Force CA2 Made to Order Specifications (For details, refer to page 6-17-1.)

NB M NA G 3 x UA thread depth UB P.C.D.R (Mounting thread) 3 x SA through SB counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) M 4 6 K 15 21 J 38 52 G 63 84 15 18 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 B 134 166 AC 6 8 AA 96 122

B Basic type F* Flange type * A key is used for size 40. ** J, K, T and Y are made to order. *** When an auto switch is mounted to the rotary actuator, only shaft types W and J are available. t Rotating angle * F: Except size 40 y Vane type i Auto switch !

Local Area: (800) 258-9200-www.stevenengineering.com AL Width across flats 12 Element Width across flats XA Unlocking cam AP V I 4-AK hole Q PL PG J AI AJ R AB X A AG AA Y + Stroke Z + Stroke For 4-AO AN AI AM Cutout window Mounting dimensions Standard Stroke Bore size (mm) Stroke range (mm) A AA B I J K L M N GC GK GL GQ GR AB AG AH AI AJ AK AL AM AN AO AP 20 75, 100, 125, 150, 200 129 12

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16