0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Compact Cylinder

9.5 12.5 15.5 16 18 13 11 13.5 B 10 10.5 12.5 13 13.5 19 21.5 20.5 A 10 13 16 16.5 18.5 13.5 11.5 14 B 10.5 11 13 13.5 14 19.5 22 21 B 15.5 16 18 18.5 19 24.5 27 26 A 7.5 10 13 13.5 15.5 10.5 8.5 11 B 7.5 8 10 10.5 11 16.5 19 18 A 11.5 6.5 4.5 7 B 7 12.5 14.5 13.5 A 15 18 21 21.5 23.5 18.5 16.5 19 A 7.5 10 13 13.5 17 12 10 12.5 A 11.5 14 17 17.5 21 16 14 16.5 Bore size 12 16 20 25 32 40 50

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42 Applicable base 10-SS5YJ7-20 10-SS5YJ7-21 Round head combination screw Individual EXH spacer assembly SYJ7000-17-1 A SYJ7000-17-2 A Thread type Thread type Nil F N T Nil F N T Rc G NPT NPTF Rc G NPT NPTF Round head combination screw Round head combination screw Gasket Round head combination screw 7 Round head combination screw 7 A B A B Adaptor plate

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

42

(Including r, t and y) No. Part no. Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

10-SS5Y5-45Stations DC4, N3 C6, N7 C8, N9 10-SS5Y5-45Stations UC4, N3 C6, N7 C8, N9 Button for DIN rail release 26 25 P = 16 (Pitch) 17 26 17 P = 16 (Pitch) 14.5 32 Button for DIN rail release 14.5 32 15.5 31.5 15.5 31.5 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 @5 @6 !2 !7 @7 !9 @3 !8 @0 !1 w N@4 !6 !

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !

Environment

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000

Aluminum High Vacuum Angle Valve

10-8 Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

MG

Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End lock mechanism (Manual release lock type) 30 Bore size (mm) e d c a b With rod end lock 80 22.5 8 12 13.3 20.3 100 30 10 13.5 15.3 23.3 Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

SYJ300/500/700

Type 40/41 How to Order 10--SS3YJ7-40 -05 --01 Applicable solenoid valve 10-SYJ714M10-SYJ724MR port 1/4 R port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A Manifold P, R port thread 40 41 Type 40 Type 41 Stations Nil Rc G NPT NPTF A A A A 2 stations : 20 stations 02 : 20 F N T P Port 1/8 P Port 1/4 01 1/8 A port size A port 1/8 A port 1/8 Note) For more than 6 stations

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Compact

Size 25 Symmetric/Top mounting LEMHT25LT-Stroke + 160 A-A T-slot for mounting 10 Stroke + 140 Stroke adjuster 17 17 4 x 5.5 Slot for auto switch 69 10.2 66 10 A Counterbore diameter 9.5, depth 5.4 B 44 Workpiece mounting center line Stroke adjuster A 3 3 Origin When LECP1, LECP6 or LECPMJ is used.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of