DOC1023125

Do not expose the actuator motor to a magnetic field with a magnetic flux density of 13 mT or more. Example 1 When installing an air cylinder with an auto switch (ex. CDQ2 series) side by side, maintain 40 mm minimum around the motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

LG1H

Note 5) For command pulse input with an open collector method.

XL

Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Caution When using an exhaust cleaner, mount it downwards.

High Vacuum Angle Valve, XL Series

Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.

DOC1023126

Do not expose the actuator motor to a magnetic field with a magnetic flux density of 13 mT or more. Example 1 When installing an air cylinder with an auto switch (ex. CDQ2 series) side by side, maintain 40 mm minimum around the motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area.

HRX-OM-Y120

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

Direct Solenoid

o.s, ercept dyo6.. op.Btins PEssubs: 28" vacuum 0 PStc {20 Kgt/cnf)' NVS/tl|-4 Prssure Fanoe: 28" vacul 3@ rlc {20 Kgrcnti) Lakage: Irort lo pon (nt.maD not to .xce.d 0.005 coblc fl pr hinut at 1@ PstG (6.7 toam) Mel4islr: all houshc !6n. atumhum d|6 cas|ngg $oor arld stc@ a40F 61atnt6r. p.5rlvated ad hdtJoai.d lo 5a52 FE*wdl c 96* orlnot Blra N, sp&.r end dl.nl hou3in!

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: T (High-lift Pump)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: JT (J + T)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: T (High-lift Pump)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BT (B + T)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-lift Pump)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BMT (B + M + T)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: JMT (J + M + T)