MLGC

16 53 30* 112 30 146 182 MGC 25 60 20 63 132 167 199 30* 37 60 20 132 63 167 202 37 28.5 25* MGF 70 25 73 162 44 210 227 33 20* CY1 Without rear plate Long stroke Bore size (mm) Bore size (mm) Stroke range (mm) Z R Y MY1 20 25 32 40 20 25 32 40 250 to 400 190 14 129 350 to 500 207 14 146 350 to 600 210 14 146 350 to 800 236 15 191 Note) Dimensions marked with "*" are not required for back

ZQ-OM01401

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

9 14 Bottom piping adapter PBT 15 O-ring HNBR Fluoro coating 16 Flow adjustment valve body PBT 17 Body Brass Electroless nickel plating 18 Needle Brass Electroless nickel plating 19 O-ring HNBR Fluoro coating 20 O-ring HNBR Fluoro coating @0 PFMB7501/7102 Component Parts !2 !1 !0oi q w e r t y u i !1 !2 No.

AWM20 to AWM40

r u Drain Drain Component Parts No.

AWM20 to AWM40

r u Drain Drain Component Parts No.

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5

Large Capacity Compressed Air Filters Series AFW

Temperature 45.30 38.30 8-5/8 2 18 215 AFW1400-N30FGM-E* 1,400 48.20 38.40 10.80 3 18 326 4 AFW2100-N40FGM-E* 2,100 50.30 39.30 12.80 4 20 439 AFW2800-N60FGM-E* 2,800 6 50.30 39.30 12.80 5 20 439 AFW3500-N60FGM-E* 3,500 54.30 40.40 14 6 20 536 AFW4200-N60FGM-E* 4,200 E D EL-AFW700-E* 55.10 40.60 16 8 24 647 AFW5600-N80FGM-E* 5,600 232 psi 32 8 250F 58.10 40.60 18 10 28 778 AFW7000-N80FGM-E

K35-OMW0030

Set point 20 mA 4 mA Ib mA Target ON Reversed position B Retracted Piston rod Set point Target end Retracted position B end 4 20 Ib Analog input current (mA) 39 7-4.

13

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 5 7 10 2 4 4 7 9 11 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 10 11 13 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 14 14 13 20 18 15 18 21 26 33 12 13 11 17

MHx-OMM0057

AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

K35-OMX0029

Signal name Input/output status Description 1 Sig-in+ Input 4-20 mA analog input signal (+) 2 Sig-inInput 4-20 mA analog input signal (-) 3 JOG+ Input JOG operation signal (Move to the extended end direction) 4 JOGInput JOG operation signal (Move to the retracted end direction) 5 PWR_DC24V DC+24 V Power supply 6 PWR_GND Power supply GND 7 Pos-out+ Output 4-20 mA analog output signal (+) 8

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Ionizer Nozzle type IZN10 Series IZS

2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions

Mist Separator

Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12. Dimensions 28 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Air Filter

How to Order AF D 30 03 B Description Symbol Body size 20 30 40 50 60 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 03 3/8 Port size 04 1/2 06 3/4 10 1 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type C N.C. (Normally closed) Drain port is closed when pressure is not supplied. auto drain D N.O.

Power Valve Precision Regulator

VEX1A33, VEX1B33 Supply pressure range Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 Proper tightening torque (Nm) Supply pressure (MPa) Supply pressure (MPa) 1 8 1 4 3 8 1 2 3 4 1 1 1 4 1 1 2 2 2. Ordinarily, air is discharged from the bleed port (PE).

IZx-OMX0087

Nozzle + High voltage power supply module + Controller IZT 43 D 1 6H 3 F U Transistor Input/Output 43 D 1 6H L T R F U IZT IO-Link One-touch fitting Symbol Metric size High voltage cable length Symbol Length (m) Model Symbol Model 6H 6 straight 43 AC type 1 1 6L 6 elbow 2 2 3 3 Symbol Inch size Number of included cable holder is different depending on the high voltage cable length (Table