0.4

Drawing shows a SC case. 4 x M5 mounting hole 10.6 D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 one-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting

AC Servo Motor Driver

U CNP3 CNP3 V V W W 10 3 10.

Air Cylinder

D-X Technical Data 45 A Air Cylinder: Standard Type Double Acting, Single Rod RoHS CJ2 Series 6, 10, 16 How to Order Z 60 16 B CJ2 A M9BW B Z 60 16 B CDJ2 A With auto switch q w e r t y u i o !

4/5 Port Solenoid Valve

Type 10-SS5YJ3-S31 Type 10-SS5YJ3-32 Type 10-SS5YJ3-S32 Type 10-SS5YJ3-32P Applicable manifold base Type 10-SS5YJ3-20 Type 10-SS5YJ3-21P Manifold base Applicable manifold base Type 10-SS5YJ3-41 Type 10-SS5YJ3-S41 Type 10-SS5YJ3-46 Type 10-SS5YJ3-S46 Manifold base Manifold base Protrusion for positioning A mark A mark Manifold gasket Manifold gasket Manifold gasket A A SYJ3000-14-7 SYJ3000

Electric Actuator

(Terminal no.) (16.6) (23.7) Cable length (L)[m] 1 3 5 8 A B C Connector A (12.7) (5.6) (7.0) 1 3 2 4 1.5 3 5 8 3 2 1 (13.5) 1 4 A 1 2 B 10 (18) (6.7) 15 (14.7) 15 16 (30.7) (11) L Connector B 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector B terminal no.

Fieldbus System

One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port

45

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

frame 10 A 20 Note 1.

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

Compact Hydraulic Cylinder

U 25 B A Approx. U 20 32 to 100 D-F7m D-J79 D-F7mW D-J79W D-F79F D-A7m D-A80 D-A7mH D-A80H D-F7NTL D-F7BAL D-J79C D-A79W D-F7mWV D-J7mV D-F7BAVL D-A73C D-A80C CHQ CHKm CHN Approx. U CHM B A Approx.

45

station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 Base Mounted Series SX3000/5000 SX5000: Serial Transmission Unit/Plug-in C4 C6 C8 SS5X5-45SStations U(Pitch) P = 16 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D.: 10 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6, 8

Fieldbus System

Transmission System S (mm) VV5QC41 S Kit (Serial transmission kit: EX260) L2 (6.5) L1 39.5 (n1) x 25 Indicator light 65.5 25 Manual override 143 10 9 9 A B A A B A A B A B A B A A A A A A A 163 B B B B B SI unit n 1 2 3 4 5 6 7 Stations D side 8 U side 2 x Rc3/4 3 (R) port [Communication connector D-sub] 2 x Rc1/2 1 (P) port SMC SMC SMC SMC SMC SMC SMC SMC 101 95.5 77.5 76.7 76.7 15.7 15.7

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

0.4

mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) Dust-tight, Water-jet-proof

Aluminum High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 @5 @6 !2 !7 @7 !9 @3 !8 @0 !1 w N@4 !6 !

REA/REB

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 10-2-18. MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45S1 U side D side U D J SI unit mounting position Number of ejectors 1 to 7 stations U side D side U D A, B port size (Valve only) 6 One-touch fitting C4 C6 Mixed M 4 One-touch fitting 0 Applicable model SUP/EXH block assembly mounting position Without SI unit General purpose type: Series EX3000 U D B M U side 2 to 10 stations A 2 to 15 stations Both sides