4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR 01T, 10, 40 D Nil D side mounting None U 01C, 01F VQ7 U side mounting Symbol Stations Passage Porting specifications (A, B) EA, EB P 02 2 stations Symbol 1 2 Side Bottom 10 Note) 10 stations Common Common Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Option Plug-in type with terminal block (6 stations) Non plug-in type: 6 stations How to

Step Motor Controller

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Made to Order

It may vary substantially depending on an ambient environment. D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n2)Note) (n=4, 6...) 5 10 5 10 15 + 15 (n2)Note) (n=4, 6...) D-A7H D-A80H Note) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. However, the minimum even number is 4. So, 4 is used for the calculation when n is 1 to 3.

SX

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

A

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Air Cylinder

Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.

Valve Single Unit

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

Valve Single Unit

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

5 Port Solenoid Valve

9 y t @0 u Lead wire colors for circular connector cable assembly terminal numbers Approx. 10 Terminal no.

Rotary Actuator

A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Compressed Air Cleaning Filter Series

JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28