Large Size Vacuum Module: Series ZR

Combination Symbol: K2 Combination Symbol: C2 Feature: Single solenoid valve is provided for supply valve. Feature: Adsorption of workpieces and release of vacuum are switched by external pilot valve.

Fieldbus System

Cylinder port size Symbol Port size C2 With 2 One-touch fitting Note 1) When multiple symbols are specified, indicate them alphabetically. Example) -BKN Note 2) When a back pressure check valve is used only for specified station, specify the back pressure check valve part number, and specify the station number to which the valve is mounted, on the manifold specification sheet.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.

Moisture Control Tube

Correction Factor C2 for Ambient Air Relative Humidity Vc: Actuator volume (mm3) D : Bore size (mm) s : Stroke (mm) Temperature Relative humidity Correction factor C2 Vc = D2s 4 25C 40C 10C 0.2 0.4 0.6 20% Fig. 2 Piping Volume Chart 0.5 1.0 1.3 40% 140 1.0 1.7 2.8 60% 2.1 4.0 5.9 75% 120 6 tube Correction Factor C3 for Supply Pressure Supply pressure (MPa) Correction factor C3 10 Tube volume

Hydraulic

(Band & Screw included) Auto switch models 25 32 40 Bore size (mm) 20 Bore size (mm) D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Axial foot CHM-L032 CHM-L040 CHM-L020 CHM-L025 Flange CHM-F032 CHM-F040 CHM-F020 CHM-F025 20 BMA2-020 BA-01 BD1-01M When ordering the axial foot type, order 2 pcs. for each cylinder. 25 BMA2-025 BA-02 BD1-02M 32 BMA2-032 BA-32 BD1-02 40 BMA2-040 BA-04 BD1-

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1

Precision Clean Regulator

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 Connection port size M5, Rc 1/8 Fluid Air, N2, CO2, Ar Proof pressure MPa 1.5 Maximum operating pressure MPa 1.0 Low pressure type Regulating pressure 0.005 to 0.2 High pressure type range MPa 0.01 to 0.4 Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Band) Cylinder series 25 32 40 50 63 80 100 125 BS1-125 140 160 180 200 20 MDB MDBB, MDNB CDA2, CDBA2 BMB1 -050 BMB2 -032 BMB2 -040 BMB1 -100 BMB1 -080 BMB1 -063 BDS-04M BDS-05M CDA2Q, CDA2H CDA2Y, CDLA CDNA, CE2 CDV3, CDVS1 BD1-01M BD1 -10M BD1 -08M BD1 -06M BD1 -04M BD1 -05M DCDL1 CDS2 CDS1, CDLS CDNS RHC CKG1 CLK2GA CLK2GB BS1-180 BS1-200 BD1-02M BD1-02 BD1-10M BD1-08M BS1 -160 BS1

Precision Clean Regulator SRP Series

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid 1.5 Proof pressure MPa 1.0 Maximum operating pressure MPa Low pressure type 0.005 to 0.2 Regulating pressure High pressure type 0.01 to 0.4 range MPa Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

Sine Cylinder Series REC

D-M9 D-M9W Note 1) qBMA2-040 wBJ3-1 Note 1) qBMA2-020 wBJ3-1 Note 1) qBMA2-025 wBJ3-1 Note 1) qBMA2-032 wBJ3-1 d Switch holder (Resin) Auto switch D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7BAL D-H7NF Set screw (not used) BMA2-020 BMA2-025 BMA2-032 BMA2-040 c Switch bracket (Stainless steel) b Auto switch mounting screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M

High Power Cylinder Series RHC

Note 1) qBMA2-040 wBJ3-1 Note 1) qBMA2-050 wBJ3-1 Note 1) qBMA2-063 wBJ3-1 Note 1) qBMA2-020 wBJ3-1 Note 1) qBMA2-025 wBJ3-1 Note 1) qBMA2-032 wBJ3-1 D-C7/C80 D-C73C D-C80C D-H7 D-H7W D-H7BAL D-H7NF BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-A3/A44 D-G39/K39 BD1-01M

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line)

Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female)