V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

4/5 Port Solenoid Valve

fitting (A, B port) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (4.9) 36 (3.6) L plug connector (L) 10-SYJ7123-L-01 (-F) M plug connector (M) 10-SYJ7123-M-01 (-F) M8 connector (WO): 10-SYJ7123-WO-01 (-F) DIN Terminal (D): 10-SYJ7123-D-01 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65 31.5[38.5] 101 MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6[49.6

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

auto-drain Control equipment Symbol Nil A AP M MP F G C E VQ7 Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Connector mounting direction Stations Symbol Applicable base With connector 02 2 stations D Nil D side mounting None 01, 01T, 10 15 15 stations U 01C, 01F U side mounting Base type 01, 01T, 10 2 to 15 stations 01C, 01F

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

Table of Contents

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

VFS

type 01C 01F 10 Control equipment Symbol Nil A AP M MP F G C E Air filter with auto-drain Connector mounting direction Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Symbol Applicable base With connector Stations D side mounting None D Nil 01, 01T, 10 02 2 stations U 01C, 01F U side mounting 15 15 stations Junction cover

5-Port Solenoid Valve

B Circular Connector B EX500 C Individual EXH (SUP) spacer assembly EX600 C EX250 SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) (Specify 1/8 (01) or 1/4 (02)) SUP Relocation EXH Relocation '-~~~r~~_ce_r _ _ .---__ ~~ r:::..:.~-,-,c.

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv 10-SS3YJ5-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

.) 10-SYJ7123-5LOU-01 (-Q) 3 sets (Single solenoid part no.) 10-SYJ7223-5LOU-01 (-Q) 2 sets (Double solenoid part no.)

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

SYJ300/500/700

[dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv 10-SS3YJ5-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5

Modular F.R.L. Units

-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type 2 Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] Option Pressure gauge 1 ISE35-N-25-MLA [ISE35-N-