ZR

M2.5 x 0.45 x 82 4 For nozzle size 18, 20 M2.5 x 0.45 x 86 4 6 6 6 6 2 2 2 2 4 4 4 4 For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle

CATALOG

IR3010 IR3020/3120 Bracket P36201023 P36202028 P36203018 Pressure Gauge G33-2-01 G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

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(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

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Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

VS 8-2/VS 8-4

r e t q w Replacement Parts VSR8-4-DFDAG FDBG FDCG VSR8-4-DFHG FIG FJG VSR8-4-FG-DVSR8-4-FG-SVSS8-4-DFHG FIG FJG VSS8-4-FG-DVSS8-4-FG-SDescription No.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

A

ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063 2 1/2 R E P A I R K I T S TA N D A R D S E R I E S NCG T E C H N I C A L SPECIFICATIONS S TA N D A R D S E R I E S NCG Bore Size Bumper

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Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Compressed Air Cleaning Filter Series

X17 P.69 Port size X26 P.70 Symbol Size 2C Applicable body size Accessory Option 3 4C 8C 11C 22C Symbol Nil Description Symbol Nil Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 B Bracket 2 Rubber material: Fluororubber For medium air pressure (1.6 MPa) Drain guide 1/4 female threaded 4 F H J R S U T V 2 Bracket is included, (but not assembled).

DM

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.



(With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

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T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking