AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None With pressure

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AMR3000 to 6000 Series How to Order Adapter Assembly (Part number for one piece) 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425

3 Port Solenoid Valve

(Double) Port size C2, C4 (2, 4 one-touch fitting) Mass (g) 31 40 V110-C2/C4 Flow Characteristics Flow characteristics Port size 2a, 2b 1(P)2a/2b C [dm3/(sbar)] C [dm3/(sbar)] 2a/2b3(E) 1(P) b b C2 C4 0.03 0.03 0.22 0.19 0.05 0.05 0.31 0.29 C6 The effective area S (mm2) is approximately 5 times as large as the sonic conductance (S C x 5). 2 3 Port Solenoid Valve Series VV100 Construction

PSE540/560

hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case: C3604 + nickel plated

PSxx-OMG0005CN

B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.7, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

Pin Cylinders Series CJP2/CJP

2 w t t y !1 o !0 !2 !4 !5 CJP2B10, 16 i e u q Built-in magnet !1 o r !0 !3 !2 t w !5 !4 Component Parts No.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

CM2

2 !3 !4 !5 !6 !

VEX1

O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate 8 1 2 4 1 Option (2) Part no.

Size: 42.5 O.D., Display Pressure: 0.2MPa, Connection Thread: R 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Size: 46 (42.5 O.D.), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Compact Vacuum Unit Ejector/ Vacuum Pump System

Current consumption 15mA or less Accuracy +/-2%F.S.