Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost
1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C 1000 1000 800 800 600 600 400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene
109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500 110 M12 x 1.75 depth 23 131 40 37 41 19 M12 x
Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.
900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance
/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
The tightening torque should be approximately 0.05 to 0.1Nm. 7 Reed Switches/Direct Mount Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
The tightening torque should be approximately 0.05 to 0.1Nm. (0.04 to 0.07 ft lb) 10 Clean Room Rodless Cylinder Series CYP Reed Switches/Direct Mount Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
The tightening torque should be approximately 0.05 to 0.1Nm. (0.04 to 0.07 ft lb) 10 Clean Room Rodless Cylinder Series CYP Reed Switches/Direct Mount Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
Load voltage Load wire (m) Auto switch model Elecrical entry direction Special function Electrical entry Wiring (Output) Specification 0.5 () 3 (L) 5 (Z) Applicable load Indicator Style DC AC details Perpendicular In-line IC circuit 5V 3 wire Z76 Yes Reed switch Grommet 100V Z73 P.5.3-23 12V Relay PLC 2 wire 24V 5V 12V 100V or less IC circuit Z80 No IC circuit 3 wire (NPN) Y59A Y69A 5V 12V
/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.
visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Port size Max. operating cycle (cpm) Response time (ms) VZ Weight (kg) Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Plug-in Non plug-in VF 2 position 3 position Single 15 or less 0.18 1200
550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.
/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
-13 D-A33A/A34A 5.3-12 D-A44 DIN terminal D-A44A 5.3-13 D-A72/A73/A80 5.3-14 Reed switch Grommet D-A72H/A73H/A76H/A80H 5.3-15 Rail D-A73C/A80C 5.3-16 Connector D-A53/A54/A56/A64/A67 5.3-17 Grommet D-A33C/A34C Terminal conduit Tie-rod 5.3-18 D-A44C DIN terminal General purpose auto switch 5.3-19 D-A90/A93/A96 5.3-20 D-A90V/A93V/A96V 5.3-21 D-90/97 Grommet Direct 5.3-22 D-90A/93A 5.3-23 D-Z73
Screw mount type Quick disconnect type High frequency: 1200 Hz Good followability and response to successive electrical signal input. Continuous operation possible. 50 L/min 80 W type Switching frequency: 1200 Hz The manifold base should be prepared by users.
MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.
R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.