2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa

TABLE OF CONTENTS

MANIFOLD MOUNTING FLANGE MOUNTING Option H Option E .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES 9/32 (7.14) DIA. 3 HOLES EQUALLY SPACED on 2 3/8 (60.3) B.C.

CATALOG VC10

MANIFOLD MOUNTING FLANGE MOUNTING Option H Option E .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES 9/32 (7.14) DIA. 3 HOLES EQUALLY SPACED on 2 3/8 (60.3) B.C.

Basic type / Direct mount type Series CY3B/CY3R

, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

202.5 Max. 10 93 Pg.7 (lead wire length) Approx. 300 83.5 (lead wire length) 85.7 97 104.5 Applicable cable O.D. 60 72.4 3.5 to 7 Stations n 3 148 137.5 120 14 90 4 173 162.5 144 14.5 114 2 123 112.5 96 13.5 66 5 198 187.5 168 15 138 6 223 212.5 192 15.5 162 7 248 237.5 216 16 186 8 273 262.5 240 16.5 210 9 298 287.5 264 17 234 10 323 312.5 288 17.5 258 11 335.5 325 312 12 282 12 360.5 350

Table of Contents

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

SY

(Station 1) (Indicator light/Surge voltage suppressor) + + + + + Height when using DIN rail Stations n 12 385.5 375 357 14.5 343 13 410.5 400 381 15 367 11 360.5 350 333 14 319 14 435.5 425 405 15.5 391 15 460.5 450 429 16 415 16 485.5 475 453 16.5 439 17 510.5 500 477 17 463 18 535.5 525 501 17.5 487 19 560.5 550 525 18 511 20 573 562.5 549 12 535 94.2 [100.7] L1 L2 L3 L4 L5 81.8 66.8 20

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

V100

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Station 1) (Station n) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=17 14.5 (Pitch) P=16 14.5 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 Station n L1 L2 L1 L2 Station 2 52 43 53 44 Station 20 340 331 359 350

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

0.4

Formula: L1 = 16n + 57, L2 = 16n + 102 n: Stations (Maximum 16 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 73 89 105 121 137 153 169 185 201 217 233 249 265 281 297 313 118 134 150 166 182 198 214 230 246 262 278 294 310 326 342 358 137.5 150 175 187.5 200 212.5 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375 148 160.5 185.5 198 210.5 223 248 260.5 273 298 310.5 323

Compact 5-Port Solenoid Valve

198 210.5 223 235.5 248 260.5 273 273 285.5 L4 112.5 125 137.5 150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 262.5 275 L5 17.5 18 18.5 19 19.5 20 20.5 21 21.5 22 22.5 23 23.5 18 18.5 n L 17 18 19 20 21 22 23 24 L1 266.3 277.8 289.3 300.8 312.3 323.8 335.3 346.8 L2 238.6 250.1 261.6 273.1 284.6 296.1 307.6 319.1 L3 298 310.5 323 335.5 348 360.5 373 385.5 L4 287.5 300 312.5 325 337.5 350

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Environment

400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight

REA/REB

Speed 600 mm/s Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) Symbol 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 High Precision Guide Type REBH Order Made

REA/REB

, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Sine Rodless Cylinder Series REA/REB

REA REB JIS Symbol Standard Stroke REC Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) Made to Order Specifications CY (For details, refer to pages 1851 to 1954.) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 CX Symbol Specifications 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XB11 Long stroke type 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700

IZx-OMT0049

distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to