TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

0.4

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

V100

) (D, Y) VS N.C.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

Sine Rodless Cylinder Series REA/REB

RHC RZQ D-X Individual -X 961 Series REAS Auto Switch Proper Mounting Position (Detection at Stroke End) B A (mm) A dimension B dimension Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 Bore size (mm) 10 35 35.5 45 44.5 40.5

REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

REA/REB

case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this

0.4

(D-sub connector) y u @0 i o !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

IZx-OMT0049

-D, IZT41-D Installation distance in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

D LEC-CSNA-1 11.1 Product no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

SX

M Special specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179