High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Made to Order

MGG series How to Order MGG XC6 Parts Changed to Stainless Steel Symbol Basic cylinder Guide unit -XC6 Flange, Front plate, Rear plate, Standard model no.

NCM

Use XC6 option to get stainless steel rod nut. Note 4) Non-rotating rod is stainless steel. Use XC6 option to get stainless steel rod nut. Note 5) Block mount not available in 7/8" and 1-1/4". Note 6) Block, Auto switch capable, S and T only available as special.

Compact Cylinder

(P. 69) Piston rod/Retaining ring/Rod end nut material: Stainless steel -XC6 Strokes in 1 mm intervals are available by installing a spacer in the standard stroke cylinder. Strokes in 1 mm intervals are available by using an exclusive body with the specified stroke.

Magnet: None, Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 20mm, Port Thread: TN (NPT), Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Magnet: None, Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 20mm, Port Thread: TN (NPT), Stroke: 25mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Magnet: None, Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 20mm, Port Thread: TN (NPT), Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: V (Single Knuckle Joint)

Magnet: None, Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 20mm, Port Thread: TN (NPT), Stroke: 150mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Magnet: None, Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 20mm, Port Thread: TN (NPT), Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Magnet: None, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: NPT, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: None, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: NPT, Stroke: 150mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: None, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: NPT, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: None, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: NPT, Stroke: 25mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Air Cylinder

Single knuckle joint -XC6 Made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type -XC9 Adjustable stroke cylinder/Adjustable retraction type * Single knuckle joint and auto switch are shipped together with the product, but not assembled.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Change of rotation range and direction Reversed shaft Fluoro grease XC3 10 XC3 XC4 15 20 XC4 XC5 XC6 XC5 XC6 XC7 30 40 XC7 XC30 For products with auto switch; angle adjustment unit cannot be selected.

CRB2/CRBU2/CRB1

between 0 to 110 Reversed shaft Fluorine grease XC2 XC3 XC3 10, XC4 15, XC5 XC4 XC5 XC6 XC7 20, XC6 XC7 30, CRB1 40 XC30 These specifications are not available for rotary actuators with auto switch unit and angle adjuster.

Table of Contents

Change of rotation range and direction Reversed shaft Fluoro grease XC3 10 XC3 XC4 15 20 XC4 XC5 XC6 XC5 XC6 XC7 30 40 XC7 XC30 For products with auto switch; angle adjustment unit cannot be selected.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Change of rotation range and direction Reversed shaft Fluoro grease XC3 10 XC3 XC4 15 20 XC4 XC5 XC6 XC5 XC6 XC7 30 40 XC7 XC30 For products with auto switch; angle adjustment unit cannot be selected.