Multi-Axis Step Motor Controller

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) 1 2 Cable length (L) [m] 15 16 Connector B Connector D (14.7) (30.7) L (11) 1 1.5 3 3 5 5 8 8*1 (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C A 10*1 Actuator side (Terminal no.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

IZN10_C

L /IZN10-B1 P /IZN10-B2 DIN /IZN10-B3 P PNP -6- 4 4 4 4 4 4 4 4-1 1 1 1 !

JXCx-OMT0005CN

B-6 8 B A-6 3 (14.2) (2) 2 1 5.5 (18) (14) A1 B1 1 6 5 17.7 (3) 2 1 A6 B6 6.3 16 15 30.7 L (11) 59 - 15.3 [5m ] LE-CP--B(1) 2 A B-1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1 5 + B-3 1 A-3 2 8 (14.2) 1 2 (2) B1 A1 17.7 1 (14) A6 B6 5 6 10.2 (3) 1 2 A1 B1 (18) 5.7 A3 B3

SFOD-OMT0005CN

3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 (-) A-3 (8) (1) (2) (B1) A1 (14.2) 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5 (3) B1 A1 2 1 (B3

SFOD-OMT0009CN

A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18) B3 A3 (d) (5.7) 15 16

JXCx-OMT0001CN

(17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C 12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3

JXCx-OMU0004

A3 2 1 5.7 15 16 L 11 30.7 11.4 [820m] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* B 15m* Shield Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 14 18 5.5 6.3 B1 A1 17.7 5 6 14.2 10.2 A6 B6 B1 A1 B3 A3 2 1 5.7 16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

JXCx-OMT0061CN

) (A3 ) ( (4 ) 5.7) 15 16 L (11) (30.7) 15.4 [820m] (1) (2) A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 A 10m* 4 (3) B 15m* Shiel d Vcc (B-4) 12 C 20m* GND (A-4) 13 A (B-5) 7 A (A-5) 6 * B (B-6) 9 * B (A-6) 8 3 (4) 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 2 1 ( (14) (18) ( (1 ) (2 ) (B 1) 5.5) A1 6.3) 6 (17.7) 5 (14.2) A6 B6 (3) B1 A1 (B3 ) (10.2

C95

L L2 d1 CD MR d2 R1 E2 UB CB 45 51 64 74 94 113 26 28 32 40 50 60 32.5 38 46.5 56.5 72 89 22 25 27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

L8 L6 B4 L5 B6 B3 B8 B4 LM B6 B5 LM Note 1) For CM and LM, indicate in the specification table. Note 2) Inch sizes use the following symbols. VQ1000 N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN.

SYJ300-OMU0003

) 1 6 2 7 V111(T)3 CE -Q 4 5 Assy HNBR 3 SYJ300 SYJ3000 3SYJ300SYJ3000 SS5YJ3-20SS5YJ3-21PSS5YJ3-21SA 3SYJ3000-33-1 R SYJ312SYJ312M SYJ300 3 SYJ322SYJ322M SYJ300 3 SS5YJ3-31-S31SS5YJ3-32-S32SS5YJ3-32SA SS5YJ3-46-S46SS5YJ3-32P SYJ3000-33-1 SYJ3000-33-1 3 R R 3AB SYJ314SYJ314M SYJ324SYJ324M SS5YJ3-41-S41 3SYJ3000-33-1 R 3AB SYJ314SYJ314M SYJ324 SYJ324M SS5YJ3-20 SS5YJ3-41 B3

Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: S (Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

Adapter Material: Brass, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: S (Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

Adapter Material: Brass, Pad Diameter: ø3.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

Adapter Material: Brass, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

Nozzle Type Ionizer IZN10E Series ®

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).