7

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. + P.627 10-SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 23 (AR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.604 10-SYJ500 Push-turn locking lever type DIN terminal 1.2 23 (AR) 1/8 (SYJ500, 700 only) P.615 10-SYJ700 M8 connector 2.7 23 (AR) 1/8, 1/4 P.627 Note) All AC voltage models have built-in

AC Servo Motor Driver (CC-Link Type ）

For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open. L1 L2 L3 Driver LECSC2-T5 / LECSC2-T7 LECSC2-T8 / LECSC2-T9 Main circuit power supply Power supply 3-phase 200 to 230VAC, 50/60Hz L1L2L3 1-phase 200 to 230VAC, 50/60Hz L1L2 When using driver built-in regenerative resistor, connect P( ) and D.

Series IDG

100 200 300 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG100L Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM 1m = 0.3048 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C 10 20 P1 = 0.5MPa 30 40 P1 = 0.7MPa 50 60 70 0 100 200 300 400 Outlet air flow rate l/min (ANR) With fitting for purge air discharge (Option: P) As the length of tubing for purge

New

, T1 = 297 p5 K, 0.07 bar b $P b 0.14 bar.

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

CLS

125 D300 300 200 200 -X 20[Example] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400

VEX1

900 800 700 600 G 500 400 300 200 100 0 1000 900 800 700 600 H 500 400 300 200 100 0 1000 900 800 700 600 I 500 400 300 200 100 0 1000 900 800 700 600 J 500 400 300 200 100 0 1000 900 800 700 600 K 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

45

(A, B port) Applicable tubing O.D.: (Pitch) P = 10.5 DIN rail release button 4 6 4-One-touch fittings (P , R port) Applicable tubing O.D.: 8 Applicable connector: 26 pins MIL type (Conforming to MIL-C-83503) DIN rail DIN rail holding screw (mm) Stations n 2 stations 10 stations 3 4 5 6 7 8 9 L1 L2 L3 L4 135.5 148 160.5 173 185.5 185.5 198 210.5 223 125 137.5 150 162.5 175 17.5 187.5 200

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

NCG/CG1

Basic Style with Bottom Mounting: CG1KRN 2-Rc P Width across flats B1 S + Stroke ZZ + Stroke Bore size (mm) 20 25 32 40 50 63 Stroke range (mm) Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 D E GA GB H H1 I KA L LD LH LX MM N P S X Y ZZ A AL B1 13 17 17 19 27 27 9.2 11 12 16 20 20 12 14 18 25 30 32 20 22 26 30 33 39 10 10 10 10 12 12 27 32 32 39 45 45 5 6 6 8 11 11 26 31 38

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

LEF-OM002xx

200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

For 1-phase 200 V AC to 240 V AC, connect the power supply to L1 and L3. Leave L2 open. Driver LECSS2-T5 to Power LECSS2-T9 L1/L2/L3 Main circuit power 3-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L2/L3 supply 1-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L3 P3/P4 Connect P3 and P4. (factory-wired) When using a driver built-in regenerative resistor, connect P+ and D.

CQ2

Refer to p.2.3-18 for rod end nut and optional bracket.