Table of Contents

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

MXS Series Air Slide Table

0 50 100 150 200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table

LEC-OM071xx

PI Control Level 1 P control 4 Switches the speed control from PI control to P control.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

+ Stroke 50 + Stroke 125 150 Rc 1/8 139 164 125 150 139 164 40 Rc 1/8 Rc 1/8 56.5 + Stroke 40.5 + Stroke 66.5 + Stroke 50.5 + Stroke 50 125.5 150.5 Rc 1/4 141.5 166.5 125.5 150.5 Rc 1/4 Rc 1/4 141.5 166.5 Note) External dimensions with rubber bumper are same as standard type as shown above.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

45

fittings (Pitch) P = 10.5 DIN rail release button (A, B port) Applicable tubing O.D.: 4 6 4-One-touch fittings (P , R port) Applicable tubing O.D.: 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 { { DIN rail holding screw DIN rail (mm) Stations n 2 stations 10 stations 3 4 5 6 7 8 9 L1 L2 L3 L4 135.5 148 160.5 173 185.5 185.5 198 210.5 223 125 137.5 150 162.5 175 17.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Type Lube Non-lube Air-hydro 125 140 160 Bore size Nil N H Lube, Non-lube Air-hydro 125 140 160 180 200 250 300 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. 125 140 160 180 200 250 300 Bore size (mm) For How to Order with auto switch, refer to page 6-9-7.

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Compressed Air Cleaning Filter Series

Body size 650 850 Page for details P.68 P.68 P.69 P.69 P.70 P.70 Description Symbol Nil Thread type X6 X37 X15 X17 X26 X12 With differential pressure gauge (GD40-2-01) With differential pressure switch (With indicator, 125 VAC, 30 VDC) With IN-OUT flange With differential pressure gauge (GD40-2-01) and IN-OUT flange N.C., N.O. auto drain, drain piping type White vaseline specifications

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Air Slide Table Series MXS

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R (2) Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type P FR (2) FP Adjuster option Note

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3 38.3 30 40 M6 x 1.0 10 8.5 40 to 100 68 105 to 120 190.5 160 125 to 200 85 205 to 300 102 32 Size Stroke range [mm] OA OB P Q S T U V WA WB WC X XA XB Y Z 35 26 70 15 to 35 54 4 5 26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100 305 100 35 123 328 160 3/4 94 155 12 24 20 60 20 108 343 120 38 131 366 93 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Front flange type: CHAF 2-Rc P V T Cushion adjustment

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

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300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.