Compact

400 400 m Motorless 200 100 200 200 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 5 10 15 20 LAT Work load [kg] Work load [kg] Work load [kg] Work load [kg] LZ 1000 1000 1000 1000 800 800 800 800 LC3F2 Wall mounting m L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 L5 Y 400 400 400 400 200 200 200 200 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 5 10 15 20 0 0 2 4 6 8 10 Work load [kg] Work load

10

D-M9l D-M9lW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 10 D-M9lV D-M9lWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-M9lA n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-M9lAV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-A9l

Compact Cylinder/Guide Rod Type Series CQM

15 5 2 pcs. 10 10 10 15 15 5 32, 40, 50, 63, 80, 100 1 pc. 10 10 5 5 10 5 15 10 5 15 15 20 15 2 pcs. 10 15 10 5 10 10 15 15 5 15 20 20 15 D-P4DWL type is compatible with bore sizes 40 to 100.

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

15

Magnetically Coupled Rodless Cylinder CY1S Series 6, 10, 15, 20, 25, 32, 40 RoHS Weight Overall length 15 % reduced 15 mm shortened Max. Max. (CY1S 15-100 stroke) 0.96 kg (Current model 1.13 kg) (CY1S 40-100 stroke) 240 mm (Current model 255 mm) Reduced in length Reduced in length CY3B CY3R CY1S CY1S Adjustment bolt improves stroke accuracy/repeatability.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

27 (37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d L d L 8 D-F8 0 15 47 25 D-M9W, D-M9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style (1) (2) (3) (4) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV.

Air Slide Table Series MXJ

(mm) Table displacement amount (mm) Table displacement amount (mm) MXJ6-15 MXJ6-15 MXJ6-5 MXJ6-5 -10 -15 0.08 MXJ6-15 MXJ6-15 0.03 MXJ6-10 MXJ6-10 -10 -15 0.15 MXJ6-10 MXJ6-10 MXJ6-5 MXJ6-5 0.06 MXJ6-5 MXJ6-5 0.02 0.10 0.04 0.01 0.05 0.02 0 10 30 50 20 10 30 50 40 60 0 5 0 10 15 20 40 60 Load (N) Load (N) Load (N) MXJ8 MXJ8 MXJ8 0.07 0.10 0.20 MXJ8-20 MXJ8-20 Table displacement amount (mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Bore size (mm) 10 15 25 10 15 25 Auto switch Nil Without auto switch For the applicable auto switch model, refer to the table below.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

cylinder: Low profile guide Series CY1F: 10, 15, 25 Data 4 types of stroke adjustment are available.

MTS

27 (37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d d 8 Data D-F8 0 15 47 25 L L D-F9W, D-F9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style ( ): Denotes the values of D-A9V, D-M9V and D-F9WV. (1) (2) (3) (4) Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 0 28 28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0

Compact

, 20 0.08 0.06 0.06 ST 5, 10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5

51

(Same surface) Auto switch mounting surface Port side Port side Port side Auto switch model D-M9(V) D-M9W(V) D-M9A(V) D-A9 10 st or more 15 to 44 st 45 st or more D-C7/C8 D-H7/H7W D-H7BA/H7NF D-C73C/C80C/H7C 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 64 st 65 st or more D-B5/B6/G5/K5 D-G5W/K59W/G5BA D-G59F/G5NT 10 st or more 15 to 74

Cylinder with Lock

D-M9 D-M9W n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-M9V D-M9WV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9A n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9AV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-A9 n 15 + 40 (n 2) 2 (n = 2, 4

Air Cylinder Series CS1

35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface) 1 115 110 105 15 115 + 40 (n4) 2 110 + 40 (n4) 2 105 + 40 (n4) 2 15 + 40 (n2

Low Profile Guide Type

Bore size (mm) 10 15 25 No. RB0805-X552 RB1006-X552 2.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

Compact Cylinder with Air Cushion Series RQ

15 15 20 1 pc. 15 15 20 20 2 pcs.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work