Air Slide Table Series MXQ

8 (L) B 7 8 22 3 9 7.5 14.6 7 9.8 MXQ 8 (L) 15 M6 x 1 M3 x 8 M3 x 10 29.5 MXQ-AS 8( L)-X11 F 25 39.5 MXQ-AS 8 (L)-X12 E 5 23.5 G MXQ-AS12 (L) MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 9.5 12 29 4 14 11 18.5 10.5 12.7 15 33.5 MXQ-AS12 (L)-X11 C 25 MXQ-AS12 (L)-X12 43.5 5 24.5 MXQ-AS16 (L) Table mounting section MXQ16 (L) M10 x 1 11 14 36 5 17 M5 x 16 M5 x 16 15 13.5 21 13 15 34.5 MXQ-AS16 (L)-X11

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l2 d3 CN S5 K1 G1 G2 EN EU CH H6 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 67 50 23 15 16 9 52 10.5 37 35 21 15 50 12 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 20 30 13.5 94 124 17 70 60 90 37 25 90 20 40 Black color

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 35 35 35 D-M9AV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs.

Air Cylinder Series CS1

35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface) 1 115 110 105 15 115 + 40 (n4) 2 110 + 40 (n4) 2 105 + 40 (n4) 2 15 + 40 (n2

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Low Profile Guide Type

Bore size (mm) 10 15 25 No. RB0805-X552 RB1006-X552 2.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

Plate Cylinder

M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5 GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 (mm) (mm) Rod End Female Thread P TN TF NY NX NS NE ND NC N MM Model S ZZ MM M6 x 1 depth 12 ZZ 74 77 85 102 106 H 14 14 15 18 21 Model MUB25 MUB32 MUB40

Round Type Hydraulic Cylinder

(n 2) 2 D-C7 D-C80 D-H7C D-C73C D-C80C D-G5/K59 D-G5W/K59W D-G59F/G5BA/G5NT D-B5/B64 50 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is

CLS

For detailed specifications, refer to page 9-15-1.

Series MXP Precision Air Slide Table

MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-

Rotary Table/Rack & Pinion Style Series MSQ

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 In addition to

Cylinder with Lock Series CLS

D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 105 110 115 15 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 15 + 40 (n2) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 90 95 100 D-Y69 D-Y7PV D-Y7WV 90 + 30 (n4) 2 95 + 30 (n4) 2 100 + 30 (n4) 2 10 + 30 (n2) 2 n pcs.

High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Magnet: Built-in, Mounting: Basic, Bore Size: 80mm, Thread Type: NPT, Stroke: 100mm, Rod End Nut: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic, Bore Size: 80mm, Thread Type: NPT, Stroke: 100mm, Rod End Nut: Male Thread, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic, Bore Size: 80mm, Thread Type: NPT, Stroke: 75mm, Rod End Nut: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -