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P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B

ON OFF Time H Unit selection function (F0) Display units can be switched with this function.

) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

demand = 1000 n/min (N)VBA2, (N)VBA4 C H A R G E C H A R A C T E R I S T I C S NVBA1 C H A R G E C H A R A C T E R I S T I C S Charging time for 10l t(s) Charging time for 10l t(s) Pressure increase ratio (P2/P1) Pressure increase ratio (P2/P1) These graphs illustrate the time required to inrease pressure in a closed tank e.g.

300 to 1000 300 to 2000 300 to 2000 100 to 400 100 to 600 100 to 800 200 to 1000 CAT.NAS100-87 Slide Table Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Series LER Symmetrical Type (L Type) Basic Type (R Type) In-line Motor Type (D Type) High Precision Type Basic Type Series LESHmR Series LESHmL Series LESHmD Series LERH Size Rotation angle () Size

0 to 300 1% 0 Immediately Tuning -1000 to 2 Anti-Resonance Filter Time Constant 1 Compensation Pn164 0.01 ms 0 Immediately Tuning 1000 -1000 to 2 Anti-Resonance Filter Time Constant 2 Compensation Pn165 0.01 ms 0 Immediately Tuning 1000 10-11 10 List of Parameters (contd) Parameter Name Setting Units Factory When Classification Reference Size No.

Up to 1000 50 47 157 128 32 71 43 15 M14 x 1.5 15 17 15 27 27 M30 x 1.5 Up to 1000 56 53 177 144 38 78.5 42 18 M16 x 1.5 15 20 17 34 30.5 M36 x 1.5 Up to 1200 (mm) Bore size (mm) Without rod boot With rod boot N P S H ZZ e f h ZZ1 l 125 140 160 30.5 1/2 98 110 235 75 40 133 1/5 stroke 258 30.5 1/2 98 110 235 75 40 133 1/5 stroke 258 34.5 3/4 106 120 256.5 75 40 141 277.5 1/5 stroke The

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

45 96 41 75 45 74 13 41 35 42 17 1/2 77 60 17 80 133 168 100 25 to 1000 14.5 M42 x 2 58 42 15 257.5 M14 x 1.5 56 115 52 90 56 86 16 50 41 38 19 3/4 79 72 22 97 146 187 Transaxial foot: CHSDLA PJ + Stroke Y J MM S + Stroke H B 2 x RcP GB GA Air release LY D E V V LH LT X1 X2 K F Y1 Cushion valve G C M Y2 MA ZA + Stroke SS BB LX 4 x CD Z + Stroke A ZZ + Stroke Stroke range Bore size (mm) BB

Please be sure to fill in the blank referring to back page 10. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override 34.7 [41.7] M5 x

Use the acceleration time constant of Point table No.1 as the acceleration time constant (msec) of Home 1000 for LEFS25 H Lead position return. Set the recommended value in the above figure.

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

1500 0 200 400 600 800 0 500 1000 1500 Flow rate L/min(ANR) Flow rate L/min(ANR) Flow rate L/min(ANR) AC40-A Rc 1/2 AC40-06-A Rc 3/4 0.6 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 0 1000 2000 3000 4000 Flow rate L/min(ANR) Flow rate L/min(ANR) Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,

1000 1000 50 40 10 100 0.0 0.0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 2 Axis 2 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Axis 3 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Movement (ex.)

YES For Water / High Temperature Fluid Type (For Water) OFF n-1 n-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate Window comparator mode H : Hysteresis GPM gal (US) "n" H H GPM = gal (US)/min Note 2) Output mode is set to inverted output at the factory before shipment.

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are

L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate Flow rate by size l/min (ANR) Standard dew point C Symbol Drain discharge method (Mist separator, Micro mist separator, Micro mist separator with pre-filter ) 10 100/25 20 200/50 30 300/75 50 60 3 25/6 25/3 75 100 5 50/12 50/6 20 15 500/125 600/125 750/150 1000/190 Nil H L Size and standard dew point

10 0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 254 47 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 Phase Stepper

1000 L/min type> Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 25 Hysteresis (H) 10 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 10 L/min) Switch ON point 25 L/min or more Switch OFF point Below 15 L/min Change the zero cut-off setting The set value (P) and hysteresis (H) cannot be changed.