REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

Dual Rod Cylinder Series CXSJ/CXS

(The dimensions are marked .) 6 589 Series CXSW Dimensions: 15, 20 CXSW15 ZZ SS S 5 10 9 25 9 10 Z 20 (25) 2 x R 3.5 2 x 4.3 through 2 x 8 counterbore depth 4.4 12 1 18 45 0.2 45 0.2 56 25 6.3 48 58 2 x R 3.5 8 5 1 12 9 4 x M4 x 0.7 thread depth 6 2 x 2 x M5 x 0.8 (Through-hole) (Z) (25) 25 2 x 2 x M4 x 0.7 thread depth 5 (Opposite side: Same) (mm) 5 10 Z ZZ SS S Model CXSW15-10 CXSW15

5 Port Solenoid Valve

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve SV 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold SYJ Blanking plate SZ Valve + Individual SUP spacer (VVQ5000-P-1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 VF Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-

Electric Actuator

load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load [kg] 5 Series LEF Table Accuracy A side B side Traveling parallelism [

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

10 x 8 6 x 4 8 x 6 10 x 8 12 x 10 12 x 10 19 x 16 19 x 16 25 x 22 1 2 4 x 3 1/4" x 5/32" 2 6 x 4 3/8" x 1/4" 3 1/4" x 5/32" 10 x 8 3 1/2" x 3/8" 4 8 x 6 4 12 x 10 3/8" x 1/4" 5 19 x 16 6 3/4" x 5/8" 25 x 22 5 B side 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1" x 7/8" C side A side 6 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 340 Union Tee Reducing Series LQ3 Dimensions Union tee reducing: LQ3T-R

CY1

0.01 0.01 0.02 5 10 15 20 0 Moment ( Nm) 5 10 15 20 0 Moment ( Nm) 25 25 25 5 10 15 20 0 Moment ( Nm) CY1HT25, 32 CY1HT25, 32 CY1HT25, 32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 Deflection (mm) Deflection (mm) 0.03 0.04 0.02 0.03 CY1HT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 80 20 40 0 60 20 40 0 60 Moment ( Nm) Moment ( Nm) Moment ( Nm) Intermediate Stops Vertical operation 1) Intermediate

Table of Contents

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Table of Contents

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSL3-16D MHSL3-16D 25 25 Pressure 0.6 MPa 20 20 Pressure 0.6 MPa Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 15 15 0.4 MPa 0.4 MPa 10 10 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 5 5 F 0 0 5 5 10 10 20 20 25 25 30 30 15 15 Gripping point L (mm) Gripping point L (mm) F F MHSL3-20D MHSL3-20D 40 Pressure 0.6 MPa 35 MHZ Pressure 0.6 MPa External grip 35 30 0.5 MPa 0.5 MPa MHF 30 25 25 20 20

0.4

COM. 25 26 COM. COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

CM2

12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

ZP

Form w 1 Material e Vacuum inlet B2 10 25 2.5 Construction p. 117 13 27.5 16 29 20 32.5 4 25 33 32 38 10 Adapter Assembly p. 121 B5 M5 x 0.8 5 8 25 2.5 13 27.5 16 29 20 32.5 4 25 33 32 38 40 47.5 4.9 12 50 51.5 20 M6 x 1 6 8 B6 N S U F GN GS ZP T B 38.5 3.5 M8 x 1.25 8 12 25 39 32 44 40 47.5 6.6 50 51.5 10 B8 31 2.5 13 33.5 16 35 20 38.5 3.5 25 39 32 44 40 47.5 7 50 51.5 Rc1/8 NPT1/8 NPTF1

V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

MXQ

(L)-X12 25 43.5 B C MXQ-AT16(L) 5 24.5 MXQ16(L) J M10 x 1 M5 x 12 MXQ-AT16(L)-X11 15 33.5 35.5 20 12 17 14 5 34.5 MXQ-AT16(L)-X12 25 44.5 A K MXQ-AT20(L) 5 27.5 MXQ20(L) MXQ-AT20(L)-X11 M5 x 14 15 M12 x 1.25 41 44.5 25 13 37.5 23 17 6 MXQ-AT20(L)-X12 25 47.5 MXQ-AT25(L) 5 32.5 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-AT25(L)-X11 15 42.5 49 53.5 31 15 28 19 6 MXQ-AT25(L)-X12 25 52.5 1) Size of hexagon

Stability of suction position,

5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5

SQ1000/2000

A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 () SOL. A 4 () Station 6 SOL. B 17 () SOL. A 5 () Station 7 SOL. B 18 () SOL. A 6 () Station 8 SOL.

Proposals for Energy Saving

39.5 20 25 32 40 50 63 80 100 30.5 (40.5) 40.5 36 (46) 46 43.5 (53.5) 53.5 53 (63) 63 Bore size (mm) L1 O N Q Th9 L G1 4.5 5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062