MTS

140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang

Rotary Actuator

In this case, please provide a buffer angle to the stroke of the actuatorUse 100 actuator in the case of 90 stroke and use 190 actuator in the case of 180 stroke. and touch it to an external stopper or the shock absorber surely. 24 25 26 27 Extreme rotating angle changes.

Low-Speed Rotary Actuator

42 67.5 46 71.5 30 90 43 59 32 7 47 63 43 3 180 51 82 55 86 40 90 50 69 24 5 54 73 36 4 180 59.5 97.5 63.5 101.5 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Parallel Style Air Gripper Series MHZ

MHW -X Mass MRHQ (g) End boss type (Symbol) MA Model E W K M DDouble acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 423 Parallel Style Air Gripper with Dust Cover Series MHZJ2 How to Order M9BW 16 MHZJ2 D Number of fingers Made to Order Refer to page 425 for details. 2 2 fingers Bore size 6 10 16 20 25 6

AC Servo Motor Driver (CC-Link Type ）

A96 Home position setting warning Home position setting could not be made. 1. Droop pulses remaining are greater than Remove the cause of droop pulse occurrence the in-position range setting. 2. Command pulse entered after clearing of Do not enter command pulse after clearing of droop pulses. droop pulses. 3. Creep speed high. Reduce creep speed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Parallel electrical entry B A A D Reed Switch D-A90(V), D-A93(V), D-A96(V) Reed Switch D-A90(V), D-A93(V), D-A96(V) Set screw (included to auto switch) (mm) Stroke (mm) 20 45 25 51 31 Stroke (mm) 10 34.5 35.5

NCG/CG1

CG1 Rod Side Trunnion Style mm TV TV ZZ + Stroke 126 to 200 st ZZ Z Bore size (mm) 1 to 50 st 51 to 100 st 101 to 125 st Clevis pin and snap ring are shipped together. 20 25 32 40 46 131 156 181 Head side trunnion style: NCGTN/CG1TN 51 136 161 186 211 Bracket mounting range 51 138 163 188 213 62 155 180 205 230 2-TD8 (Pin O.D.)

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 3000 2000 1000 3750 2500 1250 3375 5250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000) / 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 75 113 225 60 90 180

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 3000 2000 1000 3750 2500 1250 3375 5250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000) / 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 75 113 225 60 90 180

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

The installed orientation of the adapter can be changed 180. Refer to Fig. (2), which shows the relationship of the installed orientation of the selector plate adapter. Ordinarily, the speed controller is shipped as shown in Fig. (2) (a) or (b). But if you would like to change the orientation of speed controllers, use them in (c) or (d) shown in Fig. (2).

Plate Cylinder

wire (NPN) 3-wire (PNP) 2-wire 2-wire (Non-polar) 5 V, 12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

Compact Cylinder with Lock Series CLQ

(PNP) IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes Yes Yes Yes None None 24 V 2-wire 3-wire (NPN) 3-wire (PNP) Grommet IC circuit Water resistant (2-color indication) 2-wire 4-wire F79F P4DW IC circuit With diagnostic output (2-color indication) 5 V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96

•

l 15 :1-7 "140 177 144 42 19 20 236 118 275 18 M16x 1.5 \ 15 34 15 0160 Up to 1200 I 56 180 38 178.5 20 17 53 Bdre size MM N pis \VithOO1 (l}d bool\ With rod boot (Single side) (mm) (BotilSjjes,1 ZZ ZZ 341 364 341 364 367 388 1m,") H ZZ e f h 0125 M3D x 1 5 30.5 1!

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Size Port type 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil Nil TF TN TT Rotating angle 90 180 360 80 to 100 170 to 190 350 to 370 20, 30, 40 Applicable Auto Switches/Refer to pages 761 to 809 for further information on auto switches.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Note) Except size 30 Auto switch Rotating angle 90 90 180 180 100* 100 190* 190 Nil Without auto switch (Built-in magnet) * For applicable auto switch model, refer to the table below. * Flange type is not available for T, J, K. * T, J, K are made to order. Type * Except size 30 Nil Pneumatic H* Air-hydro Made to Order Refer to page 189. * Except size 30.

Compact Cylinder with Air Cushion Series RQ

Double clevis: Clevis pins, type C retaining ring for axis, and Body mounting bolts. 63 D80 -X 100 Individual -X Technical data 775 Series RQ Mass Basic Mass Additional Mass (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393