LEC-OM07605CN

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

Refrigerated Air Dryers

1258 1350 550 64 290 388 680 414 IDU55E R2 470 1345 1440 530 53 360 30 500 75 700 526 IDU75E 1480 1575 70 855 27 IDF/IDU Series Options Refer to How to Order on pages 7, 11, 14, 19, 22, 25 for optional models.

Integrated Controller

EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75 80 Vertical 3 6 12 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 Up to 400 10 to 800 5 to 400 3 to 195 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 401 to 450 10 to 700 5 to 360

Modular F.R.L. Units

The inside is visible from 360. The bowl is completely protected from the environment.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY920 --03 3 8 3 position 3 position 2.2 [2.3] 8.7 [8.3] 0.34 [0.40] 0.84 [0.84] 0.64 [0.53] 0.30 [0.27] Exhaust center Exhaust center 8.0 0.33 1.9 0.36 0.19 0.75 130 117 122 164 279 285 327 293 8.9 [3.3] 1.5 0.34 [0.40] 0.25 2.2 [0.82] 6.5 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 Pressure center Single Pressure center Single 1 8 95 119 88 91 106 111 112 153 293 296 312 318 317 360

Exhaust Cleaner for Vacuum Pump AMV Series

amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Table of Contents

How to Mount and Move the Auto Switch. 336 337 338 339 340 341 342 343 344 344 345 346 347 348 349 350 350 351 352 353 353 354 355 356 357 358 358 359 360 360 361 361 363 363 365 365 366 366 367 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Mechanically Jointed

around the stud axisBody rotates at 360 around the stud axisM5 female x M5 male

Bowls on size 30 or more are now covered with a transparent bowl guard, completely protecting them from the environment, and making the inside visible from 360 degrees. 

HRX-OM-X010

WS-F HRZ***-W1S-F HRZ***-W2S-F , Main breaker Operation display panel Ventilating fan (exhaust side) Power cable access Circulating fluid fill port Facility water outlet Ventilating hole (intake side) Sub tank drain port Emergency off [EMO] switch Facility water inlet Circulating fluid return Circulating fluid level gauge Circulating fluid supply Drain pan port Main tank drain port Rotates 360

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

IDX-OM-W094

600mm 1 2 INOUT IN OUT O IDFA60/70/80/90 Series 6-2 IDX-OM-W094 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFA60/70/80/90 Series 6-3 IDX-OM-W094 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFA60/70/80/90 Series 6-4 IDX-OM-W094 7 7.1 IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 oC 565 MPa 0.151.0 8) 1 () oC 24585% 3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360

Membrane Air Dryer

(at 0.7 MPa inlet air pressure) for the dew point indicator. -6- 1) Single Units type Model Specifications IDG30A IDG50A IDG30HA IDG50HA IDG30LA IDG50LA Compressed Air Fluid Range of operating conditions 0.31.0 -550 -550 Inlet air pressure MPa Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 360

IDX-OM-W028

855 IDU55E R2 470 1345 53 530 1440 360 30 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-3 External Dimentions 6 3 IDX-OM-W028 Air Dryer 6 References 6-4 Electrical Circuit IDU22E-23 IDU37E-23 GFCI For Option R GFCI For Option R L N PE L N PE TB TB THR MC1 OLP THR MC1 C01 OLP CM C01 CM MC2 ILS ILS FM2 MC1 THS EDV For Option V THP C12 EDV MC1 C11 MC2 FM1 MC2 C11 PRS FM1 P (G) EDV PE For

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

This matches the controller. (1) LEKFS32EA-300 4 - 1.2 Specification Battery-less absolute encoder type (Step motor 24VDC) Model LEKFS25 LEKFS16 LEKFS40 LEKFS32 Stroke [mm] 50 to 800 50 to 1000 50 to 500 150 to 1200 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] *1 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 to 400 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800