High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Auto Switch Guide

S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model CV D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5

A

Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T

7

K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

MB

B D D D D B B B MM W Cushion valve Width across flats Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C C C C Basic Foot Rod side flange Head side flange D Cushion valve Port Cushion valve Port Cushion valve Port Effective thread A A A H A K D D D B B B ZZ + Stroke

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

C76

Same side Same side Different sides Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 50 + 45(n 2) 15 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 65 65 + 50(n 2) 15 D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV D-B5l/B64 D-B59W D-Z7l/Z80 D-Y59l/Y69l/Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA Hs Auto switch Auto switch Hs Ht Ht 24.5 A B 15 A 33 B D-A3l D-G39/K39 D-A5l/A6l D-A59W G1/2 (Applicable cable O.D.: 6.8 to 9.6) Hs Auto switch Hs Ht Ht 49 56 34 S M C AUTO SWITCH S M C AUTO SWITCH A 33 B A 36 B D-A3lC D-G39C/K39C Auto switch G1/2 (Applicable cable O.D.:

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

7ND9071en

Check details of marking from N E2 ATEX and IECEx certifications: II 1 G Ex ia IIC T6...T4 Ga II 2 G Ex ib IIC T6...T4 Gb II 1 D Ex ta IIIC T90 C Da II 2 D Ex tb IIIC T90 C Db II 1 D Ex ia IIIC T90 C...T120 C Da II 2 D Ex ib IIIC T90 C...T120 C Db Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C.

Tie-rod Type Hydraulic Cylinder

W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 50 19 50 25 9 73 53 20

VFR

(Extended) Nil B A 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz Locking type B (Tool required) Locking type C (Lever) 3 110 to 120 VAC, 50/60 Hz C Option 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-78 79 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Cylinder Speed Chart Use as a guide for selection.

CL

D C B H d Tube I.D.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A C D C B When air pressure is supplied to ports A and B, both A and B strokes retract.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

B A C D A B C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 46 26 46 26 30 42 42 30 10 48 28 48 28 32 44 44 32 Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 D-Y69A D-Y69B D-Y7PV D-Y7NWV D-Y7PWV D-Y7BWV 50, 63 Grommet (In-line) Without

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

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Flal with rib (mm) (mm) Model M ,8 C D E F G H I Flat Flat with rib " . y Y Model 8 D E F H I C G >'A ,. " Flat F)at '!jilh ~ .