Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Proposals for Energy Saving

MGZ Dimensions Basic type DL GA 2-Rc P GB Y Y WM 4-MM depth M XAH7 depth XL +0.2 0 LL LM WL I HR D 2 x 4-J MB E MA MC KA NB N K C S + Stroke B H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 30 30 30 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5

Air Cylinder

Bore size Auto switch model 40 50 63 80 100 40 50 63 80 100 D-Y59D-Y7P/Y7D-Y7D-Y7BA D-A9D-M9D-M9D-M9D-F5D-J59W/F5BA D-F5NT/F59F D-Z7D-A3D-A3<C/A44C D-G5D-K59W/G5BA D-G5NT/G59F 5 6 6.5 6.5 7 9 10 11 11 11 D-A5D-G5NBL

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

V

24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D S ZP F L AT T Y P E PA D W I T H R I B P A D D I A M E T E R P A D M AT E R I A L Part No Type A C B D E F Y 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber (Standard) S Silicon

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

24

D-M9AV *1 D-A9 D-A9V D-Y69 D-Y7PV D-Y7WV *1 D-P3DWA *2 D-P4DW *2 D-P3DWA *3 D-P4DW *2 D-A9V Bore size Bore size A B A B A B A B A B 50 12.5 16.5 8.5 12.5 7.5 11.5 8 12 7 11 80 18 23.5 14 19.5 13 18.5 13.5 19 12.5 18 Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 50 32.5 38.5 36 34 44.5 50 80 40 45 74 43 71.5 41 70 49.5 78.5 61 84.5 *1: The auto switch mounting bracket BMG2-012 is used. *2: The auto

Table of Contents

C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Rotary Clamp Cylinders

0.15 0.1 0 0.052 5.5 54 72 8 62 40 28 M6 x 1.0 35 50 63 0 0.062 6.6 67 89 9 76 50 M8 x 1.25 0.15 0.1 9 80 108 9 92 60 M10 x 1.5 0.15 0.1 With arm Rod end width across flats F + Clamp stroke C + Clamp stroke D A F E B A 2 x G B D G C H (mm) (mm) H G G F F E D D C C B B A A Model MK32-M MK40-M MK50-M MK63-M Model MK32-N MK40-N MK50-N MK63-N M8 x 1.25 6.2 35.5 18 45 36 20 53.5 9 67 14 18 6

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

NCG/CG1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, D C 7 3 ( C ) / C 8 0 C , D A 7 3 ( C ) ( H ) / A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Auto switch type D-A3, A4 D-G3, K3 D-B5, B6 D-G5, K5 D-A5, A6 D-F5, J5 Cylinder bore size (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Model 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 32 25 to 800 32 40 50 63 80 100 32 40 50 63 80 100 32 40 50 63 80 100 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 BAF-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06

NCM

1.67 2.16 B 0.42 0.52 0.56 A 1.30 1.61 2.10 B 0.37 0.46 0.50 A 1.42 1.72 2.21 B 0.48 0.58 0.61 Bore size 075 (3/4") 106 (1-1/16") Mounting Height (NCDMR and NCDMR-*C) 150 (1-1/2") (in) Auto Switch Mounting Position (NCDMR-*C) D-M9 D-M9W D-A9 D-A9V D-C73C D-C80C D-G5NTL D-B5 D-B59W D-B64 Auto switch model D-M9V D-M9WV D-H7 D-H7W D-H7BAL D-H7NF D-C7 D-C80 (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C

Base Mounted Metal Seal/Rubber Seal Series VQ

L11 = L4 + 50 100 L8 = 16n + 118.5 L9 = 16n + 131 The broken lines indicate the DIN rail mounting style [-D].