Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Motor 24 VDC) Table Accuracy (Reference Value) A side B side Traveling parallelism [mm] (Every 300 mm) q Model q C side traveling parallelism to A side w D side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Cylinder with Lock Series CLS

Hs 33 Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht Hs A 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

C MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model

Modular Design with Uniform Body Style

AD27-D With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

MY1

(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2

energy saving effect

SMC Thermo-chiller Variations Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation

0.4

(D-sub connector) y u @0 i o !

New

A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston

1.63

D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V 20 to 63 B A Hs 32 to 63 D-P3DWA B A Hs Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9V D-P3DWA D-M9V D-M9WV D-M9AV D-A9 D-A9V D-P3DWA Bore size (mm) Bore size (mm) B 11 12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure