5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

V

L: L type plug connector with lead wire L: O type plug connector without connector T Y P E O F S E A L C O I L V O LTA G E 0 Metal 1 Rubber 3 110VAC (50/60Hz) 5 24VDC 6 12VDC M: M type plug connector without connector P I L O T VA LV E S P E C I F I C AT I O N S Note ) The C kit is applicable to 200/220VAC.

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin

10

24 VDC With surge voltage suppressor 4 N 100 VAC 3/8 7 P 110 VAC A B C D E F G H J K L M N P 5 Q Size 3 3 200 VAC N.C. 1/4 8 R 230 VAC 10 (N.C. only) 6 N.O.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Terminal block (M3) 9 pins Terminal block

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size 1/8, C6, C8 A, B port Applicable flat ribbon cable connector Socket: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) (MIL-C-83503 compliant) Internal wiring In common between +COM and COM (Z type: +COM only) Rated voltage 24, 12 VDC Note) The value is for manifold base and individually operated 2 position type.

IDG

200 300 400 500 AMG Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) AFF IDG50 (Type B products group) IDG60 (Type A products group) AM 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) Misc. 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 50 50 0 200 400 600 800 0 200

Programless controller Step motor (servo 24 VDC)

LEFB16 LEFB25 LEFB32 Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700

Vacuum System Peripherals:

Nil L C CL CN Grommet type N 15 Connector type NPN open collector, double output No analog output, 3 turn-set NPN open collector, double output No analog output, 200 degree set NPN open collector, single output With analog output, 3 turn-set NPN open collector, single output With analog output, 200 degree set PNP open collector, single output No analog output, 200 degree set Manual override

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

AC Servo Motor Driver

[C][0].

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

C76

rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

C76

Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

CA2

Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 C DA C0.5 30 30 A H H T H H W1 WA C Approx.

Integrated Controller

L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25 37.5 50 87 100 325 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 87 100 325 316 250 291 225 266 200 241 175 216 150 191 125 166 30 100 141 56 75 128 86 68 12.5 25 37.5 50 103 116 341 316 250 291 225 266 200 241 175 216 150 191 125 166 32 100 141 56 75 128 91 76 12.5 25 37.5 50 103 116 341 300 200 280 180 260 160 240 140 220 120 200 100 180