Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

MHC2

1 e !

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

ZPT/ZPX

E Y Y 3 3 18 34 C C A A B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D Dimensions (mm) Dimensions (mm) Model B A C D E F G Y H A B C D E F G H Y Model ZPT40HBJ25-B01-A18 ZPT63HBJ25-B01-A18 83 138.5 72 127.5 50-B01-A18 50-B01-A18 63 65.1 45.5 67.6 31.5 21.5

VQ4000

For other kits, order E type control unit.

CY1

6 e #1 @9 #0 i !0 !3 !1 !

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set

RB/RBL/RBQ

Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

10

G G 2 x Rc P Width across flats KA E Width across flats KA TX D E E D B C MM MM H1 MB K Width across flats B1 TT ZZ + 2 x Stroke H S + Stroke H + Stroke N F A MA AL H1 Width across flats B1 C B N F A AL 2 x 4 x J K TY e d 10.2 10.2 f h l When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

NCG/CG1

Z 4-LD SLOT Rod side flange style: CG1WFN End boss is machined on the flange for E.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

E (J) of the load.

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

3 Port Solenoid Valve Metal Seal Series VZ200 1

port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D TG R E FB UF TF TG MF * Supplied with 4 mounting screws.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.