CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

100

open from the fully closed state. 100 Vacuum break flow rate [L/min (ANR)] 0 10 20 30 40 50 60 70 80 90 P = 0.5 MPa P: Supply pressure [MPa] P = 0.4 MPa P = 0.35 MPa P = 0.3 MPa P = 0.2 MPa 0 1 2 3 4 5 6 7 8 9 Number of needle rotations * The flow rates shown in this graph are representative values for the ejector with silencer exhaust specification, and the suction flow may vary depending

AC Servo Motor Driver (Network card type ）

PF50 100 5 11 5.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 7) Fixed unit: kPa 100 to 100 kPa/PNP open collector 2 outputs, with suction filter 100 to 100 kPa/NPN open collector 1 output + analog voltage, with suction filter 100 to 100 kPa/PNP open collector 1 output + analog voltage, with suction filter Suction filter only !

SY

(B) 2 (A) 4 (B) 2 (B) 2 (A) 4 (A) 4 Symbols 100 Effective area (Cv factor) % 5 3 (EB) (EA) 5 3 (EB) (EA) 5 3 (EA) (EB) 75 1 (P) 1 (P) 1 (P) 50 P port regulated A port regulated (P port controlled A port regulated) B port regulated (P port controlled B port regulated) 0.1 0.15 0.2 0.25 Set pressure MPa How to Order Interface Regulators ARBY3000 05 P 2 ARBY5000 00 P 2 Regulated port Regulated

IDG

50/6 3 25/3 Nil P R None (Standard) 5 With fitting for purge air discharge 10 20 30 50 60 75 100 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 Flow direction (Right Left) With dew point indicator S Standard equipment Note) In the case of two or more options, indicate them alphabetically.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(B) 2 (A) 4 (B) 2 (B) 2 (A) 4 (A) 4 Symbols 100 Effective area (Cv factor) % 5 3 (EB) (EA) 5 3 (EB) (EA) 5 3 (EA) (EB) 75 1 (P) 1 (P) 1 (P) 50 P port regulated A port regulated (P port controlled A port regulated) B port regulated (P port controlled B port regulated) 0.1 0.15 0.2 0.25 Set pressure MPa How to Order Interface Regulators P 2 ARBY5000 00 ARBY3000 05 P 2 ARBY7000 Regulated port

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Compact Manifold Regulator Series ARM5

ITV IC SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC SMC SMC SMC SMC MADE IN JAPAN PVQ K K K P P P C C C U U U K K K P P P O O O S S S C C C L L L H H H U U U O O O S S S L L L H H H VEF VEP Front handle/Bottom ported Front handle/Top ported Mixed manifold Mixed manifold Types and sizes of the One-touch fittings can be changed.

0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Move M Speed Position Pushing F TriggLV In pos mm/s mm % % mm 0 Absolute 100 20.00 70 70 20.00 1 Absolute 100 5.00 0 0 0.50 For details of operation, and relationship between operation procedure and input/ output signals, refer to 4.3 Step Data setting method p. 19 to 27. 6 - 1.3 Teaching box 1. Name 2.

V

F S TAT I O N S 02 2 Stations to 20 20 Stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) B3T One Touch Fitting 5/32 B7T One Touch Fitting 1/4 ACCESSORIES M A N I F O L D T Y P E 40 S I D E P O R T E D T Y P E G DXT200-8-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 52 68 84 100 116 132 148 164 180 M5x0.8 L2 43 59 75 91 107 123 139 155 171

JXCx-OMU0004

P.16 5. CN1P.17 PLC 6. CN4I/O P.20 4. P.16 6.4 I/O P.23 12. P.65 ONOFF 2.2 P.7 OFF OFF OFFLED ON STOP ON OFF 79 No.JXC-OMU0004-A 12. P.65 4. P.16 6.4 I/O P.23 3.4 P.14 3.1 P.11 CP.38 2.2 P.7 ALARM ON STOP ON OFF 10 ALARM ALARM ON ON 80 No.JXC-OMU0004-A 16.2 () 2.2 P.7 4.

SQ1000/2000

pressure check valve (-B) SSQ2000-BP Built-in silencer (-S) P. 100 P. 99 P. 101 P. 103 C8 L8 Terminal number D-sub connector SOL.

High-Precision Digital Pressure Switch

IP65 2 outputs ZSE/ISE20B p. 11 IP65 2 outputs ZSE/ISE20C p. 19 Air General fluids Pressure range Pressure range 100 kPa 0 100 kPa 500 kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa 5 MPa 101 kPa 101 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 100 kPa 100 kPa 100 kPa 100 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa Withstand pressure 2 MPa

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Series IDG

50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.

MNB

: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-6-7 8 Cylinder with Lock