MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port

0.5

1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

CY1

P-44 (JT)

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Description No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.

MB

37 37 47 51 58 58 72 72 33.5 38.5 45 50 62 71.5 45 52.5 59 64 76.5 86 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19

3 Port Solenoid Valve Series VQ100 1

, E port E P 8.9 E P 11 2-3.5 Mounting hole 26.5 27.2 34 V100 (Lead wire length) 300 (Lead wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Pitch) 5 Manual override 5 G: 300 H: 600 (Lead wire length) 9 R R 21.5 15.6 28 (For DC) 34.5 (For AC) 10 25 P P + + + + + 4-M5 x 0.8 (P/R port) 2-3.5 (Mounting hole) G, H: 30.1 G, H: 30.8 (For DC) L2 3 L1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 31.8

CE

-X 20Data P . 10-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

3 Port Solenoid Valve Metal Seal Series VZ200 1

20 20 stations Rc 1/4 Built-in One-touch fittings Applicable tubing O.D. 6 C6 Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

Round Type Low Pressure Hydraulic Cylinder Series CH
M

to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28 19 15 143 25 f8 19.5 to 800 32 24 22 38 16 19 12 8 53 8 9 40 7.5 M14 x 1.5 1/8 87 M30 x 1.5 13 36 19 15 159 31 f8 21 to 800 40 24 24 41 18 21 14 11 54 10 11 48 7.5 M16 x 1.5 1/4 108 M33 x 2 19 44 24 21 183 34 f8 21 to 800 Axial foot type: CHML Width across flats B2 N GB F Effective thread H2 H N GA F Rc P Rc P

Round Type Hydraulic Cylinder

15 138 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 25 f8 5.5 1/8 81 M24 x 1.5 13 28 19 15 143 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 31 f8 7.5 1/8 87 M30 x 1.5 13 36 19 15 159 40 Up to 800 21 M33 x 2 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 34 f8 7.5 1/4 108 19 44 24 21 183 Axial foot type: CHML Width across flats B2 H N GA F N GB F Rc P Rc P 2 x NN Width

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.