VZ5000

), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L plug connector (L) VZ5240-LM plug connector (M) VZ5240-M01 02 01 02 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5240-D01 02 MAX. 10 Applicable cable

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(L) M plug connector (M) 117 (3 Position) <119> 129 (3 Position) <131> 300 (Lead wire length) 54.5 <59.5> 300 (Lead wire length) 108 (Double) <110> 120.5 (Double) <122.5> 76 (Single metal seal) <77> 82 (Single metal seal) <83> 73.5 (Single rubber seal) <74.5> 80 (Single rubber seal) <81> 54 <55> 60 <61> 49 <52.5> 1 P Cover diameter 1.5 Cross section 0.23mm2 1 P Cover diameter 1.5 Cross

NCQ2/CQ2

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

Membrane Air Dryer

purge air discharge (Option: P) !

100

[kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19 *4 ZL3H, ZL6H (Standard supply pressure: 0.5 MPa) *5 Branch + Port exhaust *6 Basic type ZL6 93*4 600*5 270*4 470 p. 19 ZL1/ZL3/ZL6 Series CAT.ES100-108B A Multistage Ejector ZL1/ZL3/ZL6 Series Energy saving Suction: 100 L Suction: 300 L Suction

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D D O U B L E C L E V I S T Y P E NCJ2D_-_T ZZ 50 100 150 200 300 400 500 3.73 3.94 4.23 4.71 3.91 4.12 4.41 4.89 5.31 5.92 6.69 *Clevis Pin Included S Z D GA NB U Bore Size A B C CD CX MM NA R 50 100 150 200 300 400 500 50 100 150 200 300 400 500 H 0.157 0.31 0.93 0.31 10 (3/8) 0.60 0.47 0.55 0.187

48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21 10 41 DIN terminal (Y) L plug connector (L) 300 (Lead wire) 88.5 89.5 Indicator light Pg.7 92.5 MAX.10 Indicator light 56 59.5 R 3 1 P Cover dia 1.5 Cross section

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

About 300 31.1 B B 54.6 [61.1] About 300 15 12 A A (Lead wire length) 1 3 2n-M3 0.5 14.5 (Pitch) P=10.5 (A, B port) [ ] for AC Other dimensions are the same as the grommet type.

Electric Actuators

Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.

Mechanically Jointed Rodless Cylinders

= 0.5 MPa MY3A50 Horizontal collision: P = 0.5 MPa 1000 1000 Collision speed (mm/s) Collision speed (mm/s) 500 500 Rubber bumper Rubber bumper 400 400 300 300 200 200 100 100 80 2 3 4 5 10 20 30 40 50 80 1 2 3 4 5 10 20 30 40 m2max m1max m3max m2max m1max m3max Load weight (kg) Load weight (kg) Horizontal collision: P = 0.5 MPa MY3A63 1000 Collision speed (mm/s) 500 Rubber bumper 400 300

0.4

q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4(A) 2(B) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

17 23 For M5 Manual override 10.5 (Pitch) P=16 18 1 20.5 10.5 35 (DIN 36.2) R P P R 57.1 [59.3] 35 (DIN 36.2) 21.5 R P P R 57.1 [59.3] 38 2-5.5 (For mounting) 2-5.5 (For mounting) 1/8 (P, R port) Approx. 300 (Lead wire length) L1 L2 Manual override 4.5 L1 L2 4.5 Approx. 300 (Lead wire length) (Station n) (Station 1) (Station n) (Station 1) (Light/surge voltage suppressor) 54.1 [61.1] + +

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L) DIN terminal (Y) 300 89 (Lead wire length) Indicator light Pg.7 92.5 Max. 10 54.5 <59.5> Indicator light 1 P 3 R Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23 mm2 300 61.5 <66.5> Indicator light 1 P 3 R < >: AC Formula L1 = 19n + 11 L2 = 19n + 23 n

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF L plug connector (L) DIN terminal (Y) VQZ 300 87 VZ (Lead wire length) 84 Indicator light VS 59.5 <64.5> 90 Max. 10 87 Pg.7 VFN Cover diameter 1.5 Cross section 0.23 mm2 P 1 3 R Indicator light Applicable cable O.D. 3.5 to 7 90.5 83 < >: AC M plug connector (M) R 3 1 P (Lead wire length) 92 81 78 300 66 <71> Cover diameter 1.5 Cross section 0.23 mm2 Indicator light P 1 3 R < >: AC Formula

Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.