SX

A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).

Modular Design with Uniform Body Style

B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1 Q2 R S U V1 V2 AC20-D 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38

7.5

1 u !0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

VFS

VV5FS2 01F 1 U 1 06 01 Nil N Rc NPT NPTF G Symbol Plug-in type With D-sub connector Series VFS2000 Manifold Connector mounting direction T F Porting specifications A, B Passage EA, EB P U side Symbol Option 1 2 Side Bottom D side mounting U side mounting D U Port size Common Common A, B P, EA, EB Symbol 01 02 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed 4 Stations 1 4 1 4 Junction

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

CQ2

A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9 6

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

SMC Basic Pneumatics

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

%silltr

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Table of Contents

r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

VQ5000

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) A 4 B 2 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

Table of Contents

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

Valve Single Unit

A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).

Valve Single Unit

A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).

0.4

+ 0.5 Manifold Optional Parts Sub-plate Single Unit Safety Instructions Specific Product Precautions R EXH EXH R 100.5 B B B B B B B B X P X P 49 24.5 9.5 STA 1B 1A 1 2B 2A 2 4B 4A 4 3B 3A 3 D SIDE U SIDE 16 TERMINANAL NO.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Fieldbus System

D B Manual override D side U side Push-turn locking slotted type: Press, then rotate it. ( ) L1 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side : Yellow Light/surge voltage suppressor 4 x M5 mounting hole SI unit EX260 SY SV VQC S0700 14 A B A B A B A 14 A B A 14 A B A 14 A 14 A (114.8) 97.5 4.7 113.4 101 1.4 81.2 12 B 12 B 5.5 B 12 B 12 B 12 10.9 34.2 L2 1.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

NCQ2/CQ2

A 32 to 200 A B U D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7 WV D-F7 V D-F7BAVL D-A7 D-A80 D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F79F 12 to 25 32 to 160 U U B A B A 32 to 100 D-P3DW A B U 188 Series (N)CQ2 High Lateral Load Water Resistant Standard Single Acting Double Rod Axial Piping End Lock Clean Series Copper/Fluorine free series Construction and Parts Auto Switch Proper Mounting