High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Table of Contents

W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4

Aluminum High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 416 b XLA/XLA V Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Table of Contents

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Table of Contents

-www.stevenengineering.com D-M9 D-F9W W D-M9V D-F9WV Hs Hs D-F9BAL Hs Hs D-A9 D-A9V D-M9, D-F9W D-M9V, D-F9WV Auto switch model W 19.5 21.5 B 4.5 4 A 11.5 12 W 5.5 6 B 4.5 4 A 11.5 12 Hs 17 19 B 0 0 A 7.5 8 W 1.5 (4) 2 (4.5) B 0 0 A 7.5 8 Symbol Bore size (mm) 12 16 D-F9BAL Auto switch model W 14.5 15 Hs 17 19 A 10.5 11 B 3.5 3 Symbol Bore size (mm) 12 16 ( ): Denotes the values of D-A93

Free Mount Cylinder

D-A9V D-M9V D-F9WV A 22 (20) 5 (7) W B ( ): Denotes the values of D-M9V, D-F9WV.

Table of Contents

D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5

ISO Cylinder

Modify the detecting position while the auto switch is secured at the position of (3) in the figure. y r a w t Auto switch mounting bracket b Auto switch mounting screw M2.5 x 0.45 x 6 L q Cylinder BQ2-012 is a set of a and b shown above.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Smooth Cylinder/Low Speed Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height a) b) Mounting 16 to 25 12 a) b) Mounting D-A9 D-A9V D-M9V D-M9WV D-M9AV Hs Hs D-M9 D-M9W D-M9A D-P3DW 25 B Hs A Auto Switch Proper Mounting Position (mm) Auto switch model D-A9V D-M9V/M9WV D-M9AV D-P3DW D-M9/M9W D-M9A D-A9 A B W B W A B A Hs Hs A B Hs B A B W A Bore size 1.5 [4] [5] 12 1.5 0 1.5 0 17 5.5

XM, XY

Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

NCQ8

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

MHZ

W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4

MHZ

W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Air Cylinder

D-X Technical Data 315 CG1W Series With Mounting Bracket Axial foot: CG1WLl LH B 15 LT LZ LX 2 LC (Knock pin position) W X Y Z LS + Stroke X M Y W 4 x LD (mm) Bore size Stroke range B LC LD LH LS LT LX LZ M W X Y Z 20 Up to 1500 34 4 6 20 53 3 32 44 3 10 15 7 47 25 Up to 1500 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 32 Up to 1500 45 4 7 25 53 3 44 58 3.5 10 16 8 53 40 Up to 1500 54.5 4 7 30