AIR COMBINATION

Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5 m Filtration / Mist separator 0.3 m Filtration efficiency 99.9 Oil mist density on the secondary side Max 1.0mg/m3 (ANR) (0.8ppm) Note3) Note4) 200 450 450 1100

Programless controller Step motor (servo 24 VDC)

1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100

A

Operating tension & compressed power kgf(kN) Weight kgf Allowable eccentricity U 40 14 1.5 60 20 31 6 11 11 22 13 600(6) 0.16 0.75 5063 18 1.5 74.5 25 41 7.5 14 13.5 27 15 1100(11) 0.31 1 1.25 80 22 1.5 89.5 29 50 9.5 19 16 32 18 1800(18) 0.58 100 26 1.5 110 35 59.5 11.5 24 20 41 24 2800(28) 1.08 2 Courtesy of Steven Engineering, Inc. !

CXT

CXTM (Slide bearing) CXTL (Ball bushing bearing) Max. movable weigh (kg) MXF Allowable static weight (kg) Allowable static weight (kg) Table displacement (mm) Table displacement (mm) Series MXW CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 3 7 12 20 30 50 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 0.015 0.019 0.044 0.180 0.123 0.109 60 70 125 125 140 170 For moving and transporting

Table of Contents

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

CC

1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 314 264 491 412 804 691 1260 1100 1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 8 20

Thomas Liquid Diaphragm Pump Flow Rate: 1100 ml / min , 1100 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 4.5 m H20 , 4.5 m H20, Voltage (DC): 24, DC Motor Type: Standard, Net Weight: .73 lbs. / .33 Kg Series Configured Datasheet.

Thomas Liquid Diaphragm Pump Flow Rate: 1100 ml / min , 1100 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 4.5 m H20 , 4.5 m H20, Voltage (DC): 12, DC Motor Type: Low Cost, Net Weight: .51 lbs. / .23 Kg Series Configured Datasheet.

Thomas Liquid Diaphragm Pump Flow Rate: 1100 ml / min , 1100 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 4.5 m H20 , 4.5 m H20, Voltage (DC): 12, DC Motor Type: Standard, Net Weight: .49 lbs. / .22 Kg Series Configured Datasheet.

Mechanically Jointed Rodless Cylinder Series MY2

Slide table Guide unit Actuator unit (Cylinder) Stroke adjusting unit Hexagon socket head mounting bolt Slider Refer to pages 1100 and 1107 for the actuator unit (cylinder) replacement part numbers. End plate 7. Do not generate negative pressure in the cylinder tube.

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Rotary Table/

Allowable kinetic energy (mJ) Size With internal shock absorber With adjustment bolt With internal shock absorber With external shock absorber With external shock absorber With adjustment bolt For high energy For low energy 1 2 3 7 10 20 30 50 70 100 200 1 0.2 to 0.7 1.5 2 6 39 7 161 231 116 25 0.2 to 1.0 574 1060 Note) 0.2 to 0.7 0.2 to 1.0 116 48 805 1210 294 81 1310 1820 0.2 to 1.5 1100

Air Checker:

For Positive Residual Pressure Compact/lightweight electronic pressure switch Addition of vacuum range (14.5 to 0 psi) (100 to 0 kPa) Easy adjustment of pressure setting trimmer New New Positive pressure adjustment range 220n 0 psi (0 MPa) Vacuum adjustment 30 range 0 psi 14.5 psi 14.5 psi 65 psi/ 58 psi AIRCHECKER PS1000-R06L (0 kPa) + 13 (100 kPa) (0.1 MPa) (0.45 MPa/0.4 MPa) PS1000/1100

1.1

242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001/002/005 No.

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Thermo-chiller Series HRS Compact Type (Except HRS050)

Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS How to Order HRS 018 A 10 Single-phase 100/115 VAC Option Symbol Nil B J M Cooling capacity 012 018 Cooling capacity 1100/1300 W (50/60 Hz) Cooling capacity 1500/1700 W (50/60 Hz) Option CE/UL None With earth leakage breaker With automatic water supply function Applicable to DI water (deionized water) piping Note) UL standards: Applicable

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

Modular/F.R.L. Units Series AC

1100 Polycarbonate Bowl material AL Semi-standard Standard Bowl guard Relieving type Regulator construction AW 0.74 0.88 0.95 1.76 1.83 Mass (kg) AG Note 1) Pressure gauge connection threads are not available for F.R.L. unit with a square embedded type pressure gauge or with a digital pressure switch (AC20C to AC40C).

Mist Separator Series AFM20/30/40

200 450 1100 0.3 m (95% filtered particle size) Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) Polycarbonate Option 8 0.18 Standard 45 0.44 AFM30 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7 MPa.