Thermo-con/Rack Mount Type

1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C 1000 1000 800 800 600 600 400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene

CG5-S

Double acting single rod Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.05MPa Without auto switch: 10 to 70C, With auto switch: 10 to 60C Ambient and fluid temperature Cushion Rubber bumper, Air cushion 50 to 1000mm/s 20 to 63 Piston speed 80, 100 50 to 700mm/s Thread tolerance JIS class 2 +1.4 0 +1.5 0 +1.4 0 +1.5 0 20 to 63 to 1000 mm, to 1200

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 40 37 41 19 M12 x 1.75 24 60

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 110 40 37 41 19 M12 x 1.75 24

RHC

RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they are available.

CA2

For Long Stroke Bore size (mm) 40 Stroke range (mm) RT RY 501 to 800 RY 601 to 1000 50 76 30 1001 to 1200 601 to 1000 63 1001 to 1200 92 40 751 to 1000 80 RT 1001 to 1400 112 45 751 to 1000 100 1001 to 1500 136 50 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 B B1 C AL D E F G H1 J K KA LD LH LS LT Without rod boot With rod boot 60 9.0 up to 500 20 to 500 30 27 22 44 16 32

CL

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Long stroke Bore size (mm) Stroke range (mm) 40 RT RY 50 to 100 501 to 800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600

Bearing Style: L (Ball Bush Bearing), Mounting: B (Basic), Bore Size: 50mm, Thread: Rc, Stroke: 1200mm, Lock Position: H (Rear Locking), Release of Manual: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 1200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: L (Locking), Auto Switch: B64--Reed, DC Volt >5 <24, AC Volt <200, 0.5M

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 80mm, Stroke: 1200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: L (Locking), Auto Switch: B64--Reed, DC Volt >5 <24, AC Volt <200, 0.5M

Bearing Style: Ball Bush Bearing, Mounting: Basic, Bore Size: 50mm, Thread: Rc, Stroke: 1200mm, Lock Position: Rear Locking, Release of Manual: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Front Flange, Style: Non-lube Air Cushion, Bore Size: 63mm, Stroke: 1200mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Locking, Auto Switch: B64--Reed, DC Volt >5 <24, AC Volt <200, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Front Flange, Style: Non-lube Air Cushion, Bore Size: 80mm, Stroke: 1200mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Locking, Auto Switch: B64--Reed, DC Volt >5 <24, AC Volt <200, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

KB

A KBX6 KBX12 KBX14 KBX16 KBX20 KBX22 27.5 26.1 25.4 24.4 22.6 21.6 7 13 15 17 21 23 Kl Ml Hl In case of KBX6, use the enclosed mounting screws designed for KBP (plug) and KBC (cap). Screw size: Cross recessed round head screw (M6 X 1 X 8l) Screw color: Black Dl MS Tl 2.1-80

Series SY100 3 Port Solenoid Valve Rubber Seal

Lead wire Without lead wire: (Only with a connector and two sockets.) 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm 6 10 15 20 25 30 50 2.1-7 Series SY100 Body Ported Grommet (G), (H): SY1 3 (A)-l ll-PM3 (-F) 1 2 G H 21.3 9 4 1.7 21 16 6.6 10 2-1.8 (Mounting holes) 2-2.8 (Mounting holes) (Indicator light and surge suppressor) 23.8 (In case of AC) Manual override G, H: 22.1 Gl, Hl

AC Servo Motor Driver (Pulse input type/Positioning type ）

rating limit Static Varistor voltage rating voltage capacity Power supply (range) (reference Varistor Surge V1 mA Permissible circuit Energy Rated pulse value) voltage current voltage immunity power [A] [V] immunity AC [Vrms] DC [V] 8/20 s [A] 2 ms [J] [W] [pF] [V] TND20V-431K 275 350 10/1 times 195 710 1300 430 (387 to 473) 200 V 1.0 100 class TND20V-471K 300 385 7000/2 times 215 775 1200

Ionizer Gun

1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 7)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

22 or less 1 4 1 8 Double 1200 13 or less VFS2230 VFS2220 0.35 1 4 1 8 1 4 1 8 1 4 1 8 1 4 Closed center VFS2320 VFS2330 0.42 600 40 or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.