High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMS0001-B Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

XL-OMY0001

-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0007 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

XL-OMV0005

AS568-025-XN1 2-2. Required jigs and tools Please refer to Table 5. Tools and instruments and Table 6. Bolt and nut size for replacing the bellows assembly. Please refer to 3-2. Disassembly Procedure (XLA/XLC Bellows assembly) of Chapter 3 Replacement for the tool size. Table 5. Tools and instruments Product name Description Dust-free gloves Used during operation.

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0017 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

XLA Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Valve size Construction No.

XL-OMV0002

XL-OMV0002 2.2 Assy Assy 16 25 40 50 XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025

High Vacuum L Type Valve

AS568-025-XN1 Note2) Refer to the Construction of each series for the construction numbers. Note3) Due to the different materials used, changing only the seal may prove inadequate.

XL-OMY0003

** B2401-V24** B2401-P42 ** AS568-227 ** 1) FKM:No.1349-80** AS568-025-XN1 2) 4 3) FKM for EPDM Barrel ULTIC ARMOR R R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R R Kalrez Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0016 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

air-filter-e

Nominal filtration accuracy Note) Symbol Nominal filtration accuracy (m) Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FGF. 005 010 025 050 100 5 10 25 50 100 Element symbol Note) Nominal filtration accuracy refers to the filtration accuracy according to SMC criteria, and serves as a guideline for the particulates that can be filtered out.

smcmaintenancepartslist

Nominal filtration accuracy Note) Symbol Nominal filtration accuracy (m) Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FGF. 005 010 025 050 100 5 10 25 50 100 Element symbol Note) Nominal filtration accuracy refers to the filtration accuracy according to SMC criteria, and serves as a guideline for the particulates that can be filtered out.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

weight per each 50mm of stroke Switch mounting screw M2.5 x 12l Bore size (mm) BMY2 -025 Switch mounting nut Type A Type B 25 0.016 0.015 0.275 0.25 3.86 32 0.041 0.040 0.425 0.41 6.05 40 0.080 0.076 0.545 0.50 8.38 Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.8 0.7 0.6 0.5 0.4 0.2 0.3 25 392 98 490 343 294 245 196 147 32 643 161 804 563 483 402 322

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

weight per each 50mm of stroke Switch mounting screw M2.5 x 12l Bore size (mm) BMY2 -025 Switch mounting nut Type A Type B 25 0.016 0.015 0.275 0.25 3.86 32 0.041 0.040 0.425 0.41 6.05 40 0.080 0.076 0.545 0.50 8.38 Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.8 0.7 0.6 0.5 0.4 0.2 0.3 25 392 98 490 343 294 245 196 147 32 643 161 804 563 483 402 322

ML1C

Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

ML1

Note Applicable swich USwitch mounting screw M2.5 X 10 l BMY1-025 D-E73A/76A/80A 25 32 40 USwitch mounting nut USwitch mounting screw M2.5 X 12 l D-M5N/M5P/M5B D-M5NW/M5PW/M5BW D-M5NTL/M5PTL BMY2-025 USwitch mounting nut 4.7-4 Hy-Rodless Cylinder SeriesML1 Cylinder Specifications 25 32 40 Bore size (mm) Guide mechanism Cam follower guide Fluid Air Action Double acting Operating pressure range

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

NUT ACCESSORIES SERIES NCJ2 MOUNTING NUT MM L L1 PART NO BORE SIZE B R NX ND U NO6-40UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J010B 10 (3/8) NO10-32UNF 0.94 0.75 0.39 0.54 0.188 0.188 0.56 NY-J016B 16 (5/8) Note) includes Rod Jam Nut, Clevis Pin and 2 Retaining Rings PART NO BORE SIZE A B C D PART NO BORE SIZE A B C D 0.31 0.11 0.11 5-40UNC JM-005 6 (1/4) 0.44 0.50 0.16 1/4-28UNF JM-025

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

/Mounting Method -X2321/-X2322 Applicable cylinder -X2091/-X2092 -X2321/-X2322 D-M9;V/M9;WV Applicable auto switches D-P3DW; D-A73/A79W 32 32 32 Bore size (mm) BMU1-025 (Below , ) Auto switch mounting CKU32-42-088EN-R BMU1-025 BQ2-012 (Below , ) bracket part no.

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal