AW

(with color zone) H 37.5 37.5 42.5 42.5 42.5 AF F M18 x 1 M28 x 1 K 0 5 3.5 1.5 1.2 3.2 H 28 28 28 28 28 J 27 30.5 38.5 38.5 44.5 H 27.8 27.8 27.8 27.8 27.8 J 37.5 41 49 49 61.5 H 26 37.5 37.5 42.5 42.5 42.5 J 26 63 66 76 76 84 J 63 66 76 76 84 AW10 AW20(K) AW30(K) AW40(K) AW40(K)-06 AW60(K) 13 26 29.5 37.5 37.5 43.5 30 38 38 47.5 12.5 26 29.5 37.5 37.5 43.5 48 73 86 92 93 175 108

HRX-OM-R026

HRSH Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OM-R026 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Smooth Cylinder/Low Speed Cylinder

16 0.090 J Precautions Standard Stroke Be sure to read before handling.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

LVQ

N.C. valve Q E (P) R Sensor (breathing) port Rc 1/8 (NPT 1/8) LQ3 integral fitting 1/8 ( 3, 4) Pilot port Rc 1/8 (NPT 1/8) Pilot port F K A B A B J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQm0-Zmm Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-Zmm LVQ30-Zmm LVQ40-Zmm LVQ50-Zmm LVQ60-Zmm 25.5 46 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21

13

26.75 I J K L M N O Model 3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 Rc 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Air Combination

,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D -(F,N)02~(F,N)04(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,

5

16 0.090 J Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard Strokes Made to Order (For details, refer to pages 1069 to 1262.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Title not found

J @ 1." roll T Length per roll 20nr 33mB"l 100m is3!

NCQ8

J M2 bolt circle W M1 E I dia.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.