Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 11 11 11 C [dm3/(sbar)] 0.24 0.24 0.24 1 4/2 (P A/B) b VQZ 2 position metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 12 12 C [dm3/(sbar)] VQD 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) b 2.9 2.9 2.9 Cv 12 12 12 C [dm3/(sbar)] 0.33 0.33 0.33 1 4/2 ( RA/B)

Table of Contents

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.

HRX-OM-T002

AL45 Compressor over current *12 AL47 Pump over current AL50 Incorrect phase error AL51 Phase board over current *12: Water-cooled type model does not generate this alarm.

Booster Regulator/Air Tank

VBA43A-04 (0.2 to 1.6 MPa) VBA40A-04 1/2" Air Tank Series VBAT P. 12 Perfect fit with a booster regulator This is an air tank to which a booster regulator can be connected compactly.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

Metal Seal/Rubber Seal Series VQ Body Ported

Description Material Number VVQ1000-80A-3-2 i Seal HNBR 12 VVQ1000-80A-4 o Clip Stainless steel 12 Note) A set of parts containing 12 pcs. each is enclosed. !0 Fittings assembly part no. VVQ1000-50ANote 1) Note 2) Standard SUP/EXH port is C6. Purchasing order is available in units of 10 pieces.

ASR

Note 3) Not used for 10 and 12. 15-16-8 Air Saving Valve Pressure Valve/Flow Valve Series ASR/ASQ Flow Valve: Series ASQ Variable type Fixed type @2 @5 @6 @4 @3 @2 @5 @6 @4 @3 y u i ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type o !5 !3 !5 !2 !4 !1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !

V

Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

HRX-OM-Q026

When the ambient Continuous monitoring temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG-04-10 AS331FG-N03-11 32.6 58 53.5 21 32.6 49.4 43.7 10 18.5 3/8" 17.9 16.2 104 65 16.2 23 21 25.8 R 1/2 57.6 50.1 28.6 24 49.6 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 61.7 55.3 22 32.6 52 49.4 12 20.9

High Purity Chemical Valve

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Base Mounted Metal Seal/Rubber Seal Series VQ

1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Inrush 1.3 VA (12 mA), Holding 1.3 VA (12 mA) 110 VAC VQD Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC Inrush 2.6 VA (12 mA), Holding 2.6 VA (12 mA) 220 VAC Note 1) Note 2) Use dry air to prevent condensation when operating at low temperatures.

HRX-OM-M090

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-M090 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

New

AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 1 ANB1-12 280 1 4 ANB1-14 450 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 610 Construction/Parts/Dimensions Sound absorbing material ANB1-01 to 04 Case (PVF ) End plate JIS Symbol VEX AN Hexagonal flats ANB1-04: PP AMC Cover ANB1-06 to 14 How to Order Sound

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

E-P HYREG ® Series VY1

) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size

HRX-OM-R005

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-8 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R005 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

HRX-OM-R016

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R016 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.