CNA

Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/

CNA

Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

5 Port Solenoid Valve

kit J kit Page 26 Manifold Optional Parts Page 28 Construction Page 29 Manifold Exploded View S kit Page 32 Plug-in Manifold Stacking Base EX260 Page 32 Serial Transmission S kit EX250 Page 44 D-sub Connector F kit EX600 Page 48 Flat Ribbon Cable P kit F kit EX500 Page 52 PC Wiring System Compatible Flat Ribbon Cable J kit P kit Page 56 Terminal Block Box T kit J kit T kit Page 60 Lead Wire

Electric Actuator

Note 10) With lock only Note 11) For an actuator with lock, add the power consumption for the lock.

NCA1

JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30

NCA1

JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Floating Joint

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 1148 JA Series Made to Order: Individual Specifications Please contact SMC for detailed dimensions, specifications and lead times.

Electric Grippers

Bolt Max. tightening torque [Nm] Model LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 M2.5 x 0.45 0.3 M3 x 0.5 0.9 Finger M4 x 0.7 1.4 Attachment M5 x 0.8 3.0 Runoff space Runoff space M6 x 1 5.0 Needle shaped workpiece Thin plate workpiece M8 x 1.25 12.0 4.

Cylinder with Lock

(mm) (mm) Bore size (mm) 40 50 63 80 100 Bore size (mm) Stroke range (mm) 40 50 63 80 100 d l J K KA M MM N P S T V ZZ e f h ZZ 52 6 14 11 M14 x 1.5 27 1/4 153 37.5 9 215 20 to 800 43 15 59 1/4 stroke 223 M8 x 1.25 58 7 18 11 M18 x 1.5 30 3/8 168 44 11 237 20 to 1000 52 15 66 1/4 stroke 245 M8 x 1.25 58 7 18 14 M18 x 1.5 31 3/8 182 52.5 12 254 20 to 1000 52 17.5 66 1/4 stroke 262 M10 x 1.25

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

CRQ2

page 11-8-12.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

=j:!

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

M-E05-1-LQ1

Insert pin material Nil Resin S Stainless steel J Common to J/K Table 1 Tubing size symbols Tubing O.D.

CL

11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

51

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Allowable kinetic energy Symbol Specification 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.